CO<sub>2</sub>激光改性溶胶-凝胶SiO<sub>2</sub>薄膜光谱及紫外纳秒激光损伤特性研究

CO₂激光改性溶胶-凝胶SiO₂薄膜光谱及紫外纳秒激光损伤特性研究

袁凯欣, 卓瑾, 张清华, 李亚国^*

Study on the Spectral and Laser Damage Resistance of CO₂ Laser Modified Sol-Gel SiO₂ Thin Films

YUAN Kai-xin, ZHUO Jin, ZHANG Qing-hua, LI Ya-guo^*

经过不同激光功率的CO₂激光处理和退火热处理后薄膜的激光损伤概率; 经12 W激光处理后薄膜的激光损伤阈值最大