光学玻璃基底原子层同质材料沉积薄膜光谱及激光诱导损伤特性研究

程海鹏^1,², 耿锋², 刘民才², 张清华², 李亚国^1,^*

Spectral and Laser-Induced Damage Characteristics of Atomic Layer Deposited SiO₂ Films on Fused Silica Glass

CHENG Hai-peng^1,², GENG Feng², LIU Min-cai², ZHANG Qing-hua², LI Ya-guo^1,^*

样品表面粗糙度(RMS) (a): 熔石英衬底, 1.88 nm; (b): 275 ℃, 0.89 nm; (c): 300 ℃, 0.76 nm; (d): 325 ℃, 0.88 nm; (e): 350 ℃, 1.67 nm