硬X射线微束掠入射实验的控制和数据采集系统及其应用

兰旭颖^1,^2,³, 何上明^1,^3,^*, 郑怡^1,³, 李爱国^1,³, 王劼^1,³

Control and Data Acquisition System for Hard X-Ray Micro-Beam Grazing Incident Experiment and Its Application

LAN Xu-ying^1,^2,³, HE Shang-ming^1,^3,^*, ZHENG Yi^1,³, LI Ai-guo^1,³, WANG Jie^1,³

(a) -0.1°掠入射角时10 nm Au/Cr/Si GIXRD花样; (b) 0°掠入射角时10 nm Au/Cr/Si GIXRD花样; (c) 0.1°掠入射角时10 nm Au/Cr/Si GIXRD花样; (d) 0.3°掠入射角时10 nm Au/Cr/Si GIXRD花样