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基于可变相位延迟的激光干涉式亚纳米级微位移测量系统
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刘通1,2 , 张刘1,* , 张冠宇1, 陈晨1,* , 仲志成1 |
A Laser Interferometric Subnano-Scale Micro-Displacement Measurement System Based on Variable Phase Retardation
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LIU Tong 1,2 , ZHANG Liu 1,* , ZHANG Guan-yu 1, CHEN Chen 1,* , ZHONG Zhi-cheng 1
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系统以10 nm间隔的时域位移测量结果(主图)及其对应测量值的线性拟合(右上子图) |
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