基于可变相位延迟的激光干涉式亚纳米级微位移测量系统

刘通^1,², 张刘^1,^*, 张冠宇¹, 陈晨^1,^*, 仲志成¹

A Laser Interferometric Subnano-Scale Micro-Displacement Measurement System Based on Variable Phase Retardation

LIU Tong^1,², ZHANG Liu^1,^*, ZHANG Guan-yu¹, CHEN Chen^1,^*, ZHONG Zhi-cheng¹

位移测量系统核心光路示意图