|
|
|
|
|
|
| Calibration Method of Pressure Gauges Based on Cavity Ring-Down Spectroscopy Technique |
| ZHOU Sheng1, 2, HAN Yan-ling1, LI Bin-cheng1, 3* |
1. Institute of Optics and Electronics, Chinese Academy of Sciences, Chengdu 610209, China
2. University of Chinese Academy of Sciences, Beijing 100049, China
3. School of Optoelectronic Information, University of Electronic and Science and Technology of China, Chengdu 610054, China |
|
|
|
|
Abstract The accurate measurement of pressure is of great importance to industry process control. In absorption spectroscopy, the spectral line profile and line-width of gas depend on the molecular interactions, temperature, pressure and other factors. The pressure induced line- broadening effect of narrow-band absorption lines of gases can be used for pressure measurement and calibration. A novel pressure gauge calibration method based on cavity ring-down spectroscopy (CRDS) and pressure induced line-broadening effect is presented and experimentally demonstrated at room temperature with a CRDS setup employing a 5.2 μm tunable quantum cascade laser and an absorption line of trace moisture in air near 1 877 cm-1 wavenumber. The measured line-width is 0.084 21 cm-1, and the corresponding pressure is 98.12 kPa, which is in good agreement with a high-precision pressure gauge reading 98.14 kPa. A pressure measurement limit of 0.18 kPa is achieved, estimated from the line-width measurement uncertainty. In addition, the measured pressure broadening coefficient is (0.087 12±0.000 965) cm-1·atm-1, which is in good agreement with the reference value 0.087 1 cm-1·atm-1 given by HITARN database at the same temperature. The proposed method is applied to calibrate a small-scale pressure gauge with sufficient accuracy. The results indicate that high-resolution measurement of absorption line based on CRDS has the potential for high-accuracy pressure measurement and calibration.
|
|
Received: 2016-12-30
Accepted: 2017-05-16
|
|
|
|
Corresponding Authors:
LI Bin-cheng
E-mail: bcli@uestc.edu.cn
|
|
[1] Tee B C -K, Chao W, Allen R, et al. Nat. Nanotechnol. 2012, 7: 825.
[2] Someya T, Sekitani T, Iba S, et al. Proc. Natl Acad. Sci. USA，2004, 101: 9966.
[3] Chen Y, Tee B C -K, Chortos A L, et al. Nat. Commun.，2014, 5: 5028.
[4] Yamamoto S. J. Phys. E: Sci. Instrum. 1981, 12: 931.
[5] Peggs G N, Elliott K W T, Lewis S. Metrologia, 1979, 15: 77.
[6] Cheng C F, Sun Y R, Hu S M. Chin. Phys. B, 2015, 5.
[7] Koichi M T, Yamada A, Atsushi O, et al. C. R. Physique, 2009, 10：907.
[8] Hagen C L, Lee B C, Franka I S, et al. Atmos. Meas. Tech.，2014, 7: 345.
[9] Ngo N H, Ibrahim N, Landsheere X, et al. J. Quant. Spectrosc. Radiat. Transfer.，2012 113: 870.
[10] Gamache R R, Lamouroux J, Laraia A L, et al. J. Quant. Spectrosc. Radiat. Transfer.，2012, 113: 976.
[11] O’Keefe A, Deacon D A G. Rev. Sci. Instrum.，1988, 59(12): 2544.
[12] Wagner N L, Dubé W P, Washenfelder R A, et al. Atmos. Meas. Tech.，2011, 4: 345.
[13] Whittaker K E, Ciaffoni L, Hancock G, et al. Appl. Phys. B，2012, 109: 333.
[14] Sheng Z, Yanling H, Bincheng L. Appl. Phys. B, 2016, 122: 187.
[15] He Y, Jin C, Kan R, et al. Opt. Express.，2014, 22(11): 13170.
[16] CHEN Bing, ZHOU Ze-yi, KANG Peng(陈 兵, 周泽义, 康 鹏，等). Spectroscopy and Spectral Analysis(光谱学与光谱分析), 2015, 35(4): 971.
[17] Boyson T K, Rittman D R, Spence T G, et al. Opt. Express，2014，22(9)：.
[18] Phillips M C, Taubman M S, Bernacki B E, et al. Analyst, 2014, 139: 2047.
[19] Anderson P W. Phys. Rev.，1949, 76.
[20] Demtrder W. Laser Spectroscopy, Chapter 3，Springer, Berlin, 2002.
[21] Rothman L S, Gordon I E, Babikov Y, et al. J. Quant. Spectrosc. Radiat. Transfer.，2013, 96: 1.
[22] Huang H F, Lehmann K K. Appl. Opt.，2010, 49(8): 1378.
[23] Nelder J A, Mead R. The Computer Journal，1965, 7(4): 308. |
| [1] |
BAI Bing1, 2, 3, CHEN Guo-zhu2, 3, YANG Wen-bin2, 3, CHE Qing-feng2, 3, WANG Lin-sen2, 3, SUN Wei-min1*, CHEN Shuang1, 2, 3*. The Study on Precise and Quantitative Measurement of Flame OHConcentration by CRDS-CARS-PLIF Techniques[J]. SPECTROSCOPY AND SPECTRAL ANALYSIS, 2023, 43(12): 3955-3962. |
| [2] |
WANG Chun-hui1, 2, YANG Na-na2, 3, FANG Bo2, WEI Na-na2, ZHAO Wei-xiong2*, ZHANG Wei-jun1, 2. Frequency Locking Technology of Mid-Infrared Quantum Cascade Laser Based on Molecule Absorption[J]. SPECTROSCOPY AND SPECTRAL ANALYSIS, 2023, 43(08): 2363-2368. |
| [3] |
SHEN Feng-jiao1, 3, TAN Tu2*, LU Jun1, ZHANG Sheng1, GAO Xiao-ming2, CHEN Wei-dong3. Research on Middle Infrared Laser Heterodyne Remote Sensing
Technology Based on EC-QCL[J]. SPECTROSCOPY AND SPECTRAL ANALYSIS, 2023, 43(06): 1739-1745. |
| [4] |
LI Qing-yuan, LI Jing, WEI Xin, SUN Mei-xiu*. Performance Evaluation of a Portable Breath Isoprene Analyzer Based on Cavity Ringdown Spectroscopy[J]. SPECTROSCOPY AND SPECTRAL ANALYSIS, 2021, 41(08): 2415-2419. |
| [5] |
ZHANG Huai-lin, WU Tao*, HE Xing-dao. Progress of Measurement of Infrared Absorption Spectroscopy Based on QCL[J]. SPECTROSCOPY AND SPECTRAL ANALYSIS, 2019, 39(09): 2751-2757. |
| [6] |
LI Chun-guang1, 2, 4, LIN Jun2*, DONG Lei3*, WANG Yi-ding4. High Sensitive Photoacoustic Gas Sensor Based on Low Output Power Laser and Digital Lock-in Technology[J]. SPECTROSCOPY AND SPECTRAL ANALYSIS, 2019, 39(06): 1970-1974. |
| [7] |
CHI Hao-tian, WANG Xu-lin*, QUAN Wei*. Pressure Measurement of Each Gas in Alkali-Metal Vapor Cell with a Mixed Gas Based on Saturated Absorption Spectrum[J]. SPECTROSCOPY AND SPECTRAL ANALYSIS, 2018, 38(03): 948-952. |
| [8] |
HU Chun-dong1，2, YAN Jing-yang1，2, WANG Yan1，2, LIANG Li-zhen1*. Study on Cavity Ring-Down Spectroscopy in High Power Ion Source[J]. SPECTROSCOPY AND SPECTRAL ANALYSIS, 2018, 38(02): 346-351. |
| [9] |
LÜ Mo1, WANG Yi-ding1*, CHEN Chen2*. Development of Mid-Infrared Trace-CO Detector with Long-Path Differential Optical Absorption Spectroscopy (LP-DOAS)[J]. SPECTROSCOPY AND SPECTRAL ANALYSIS, 2017, 37(07): 2278-2282. |
| [10] |
ZHOU Sheng1, 2, HAN Yan-ling1, LI Bin-cheng1, 3* . Trace Moisture Measurement with 5.2 μm Quantum Cascade Laser Based Continuous-Wave Cavity Ring-Down Spectroscopy [J]. SPECTROSCOPY AND SPECTRAL ANALYSIS, 2016, 36(12): 3848-3852. |
| [11] |
LI Chun-guang1, DANG Jing-min1, LI Jian1, 3, FU Li1, CHEN Chen2*, WANG Yi-ding1*. A Methane Gas Sensor Based on Mid-Infrared Quantum Cascaded Laser and Multipass Gas Cell[J]. SPECTROSCOPY AND SPECTRAL ANALYSIS, 2016, 36(05): 1291-1295. |
| [12] |
LI Chun-guang1, DANG Jing-min1, CHEN Chen2*, WANG Yi-ding1*. Multi-Pass Absorption Spectroscopy for CO Detection Using a Quantum Cascaded Laser[J]. SPECTROSCOPY AND SPECTRAL ANALYSIS, 2016, 36(05): 1308-1312. |
| [13] |
CHEN Bing1, ZHOU Ze-yi2, KANG Peng1, LIU An-wen1, HU Shui-ming1* . Trace Carbon Monoxide Detection with a Cavity Ring-Down Spectrometer [J]. SPECTROSCOPY AND SPECTRAL ANALYSIS, 2015, 35(04): 971-974. |
| [14] |
QIU He, LIU Ming-jun, TIAN Xiao-feng . Pre-Alarming Apparatus for Earthquake Based on Mid-Infrared Trace Methane Detection [J]. SPECTROSCOPY AND SPECTRAL ANALYSIS, 2014, 34(06): 1524-1527. |
| [15] |
CHEN Chen1, WANG Biao4, LI Chun-guang2, LI Jian2, 3*, WANG Yi-ding2* . A Trace Gas Sensor Using Mid-Infrared Quantum Cascaded Laser at 4.8 μm to Detect Carbon Monoxide[J]. SPECTROSCOPY AND SPECTRAL ANALYSIS, 2014, 34(03): 838-842. |
|
|
|
|
