| 光谱学与光谱分析 |
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| Optimum Design of Imaging Spectrometer Based on Toroidal Uniform-Line-Spaced (TULS) Spectrometer |
| XUE Qing-sheng, WANG Shu-rong |
| Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences, Changchun 130033, China |
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Abstract Based on the geometrical aberration theory, a optimum-design method for designing an imaging spectrometer based on toroidal uniform grating spectrometer is proposed. To obtain the best optical parameters, twice optimization is carried out using genetic algorithm(GA) and optical design software ZEMAX. A far-ultraviolet(FUV) imaging spectrometer is designed using this method. The working waveband is 110～180 nm, the slit size is 50 μm×5 mm, and the numerical aperture is 0.1. Using ZEMAX software, the design result is analyzed and evaluated. The results indicate that the MTF for different wavelengths is higher than 0.7 at Nyquist frequency 10 lp·mm-1，and the RMS spot radius is less than 14 μm. The good imaging quality is achieved over the whole working waveband, the design requirements of spatial resolution 0.5 mrad and spectral resolution 0.6 nm are satisfied. It is certificated that the optimum-design method proposed in this paper is feasible. This method can be applied in other waveband, and is an instruction method for designing grating-dispersion imaging spectrometers.
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Received: 2012-08-20
Accepted: 2012-10-31
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Corresponding Authors:
XUE Qing-sheng
E-mail: qshxue2006@163.com
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