| 光谱学与光谱分析 |
|
|
|
|
|
| Ultraviolet Transmission Spectra of BCxN Thin Films |
| WANG Yu-xin1, 2, FENG Ke-cheng1, LI Ying-ai2, LI Wei-qing2, LIU Li-hua2, ZHAO Chun-hong2, ZHAO Yong-nian2 |
1. College of Science, Changchun University of Science and Technology, Changchun 130022, China
2. National Key Laboratory of Super-Hard Materials, Jilin University, Changchun 130012, China |
|
|
|
|
Abstract BCN, BC2N and BC3N thin films with transmission increasing properties in the ultraviolet region were deposited by RF magnetron sputtering with different sputtering power (80-130 W). Fourier transform infrared absorption and X-ray photoelectron spectroscopy results suggested that the films were atomic-level hybrids composed of B, C and N atoms. The compositions and transmission increasing properties of samples in the ultraviolet region were strongly influenced by sputtering power, which determined the transmission increasing properties in the ultraviolet region by changing compositions. And the lower the atomic number of C in the thin films, the better the transmission increasing properties in the ultraviolet region. The BCN thin films deposited at the sputtering power of 110 W possessed the lowest atomic number of C and the best transmission increasing properties in the ultraviolet region. And the increase in average transmissivity from 200 to 350 nm was about 40% compared with glass.
|
|
Received: 2005-01-16
Accepted: 2005-05-08
|
|
|
|
Corresponding Authors:
WANG Yu-xin
|
|
| Cite this article: |
|
WANG Yu-xin,FENG Ke-cheng,LI Ying-ai, et al. Ultraviolet Transmission Spectra of BCxN Thin Films [J]. SPECTROSCOPY AND SPECTRAL ANALYSIS, 2006, 26(01): 102-105.
|
|
|
|
| URL: |
|
https://www.gpxygpfx.com/EN/Y2006/V26/I01/102 |
[1] Kawaguchi N. Adv. Mater., 1997, 9: 615.
[2] Watanabe M O, Itoh S, Mizushimak K, et al. J. Appl. Phys., 1995, 78: 2880.
[3] Fayeulle S, Nastasi M. J. Appl. Phys., 1997, 81: 6703.
[4] Dekempeneer E H A, Menever J, Kuyper S, et al. Thin Solid Film, 1996, 281: 331.
[5] Yuki T, Umeda S, Sugino T. Diamond Relat. Mater., 2004, 13: 1130.
[6] Zhou Z F, Bello I, Lei M K, et al. Surf. Coat. Technol., 2000, 128: 334.
[7] HE Chen-juan, LI De-hua, LU Zhen-zhong, NIE Yu-xin, WANG Xue-jin, YUAN Hong-tao, FENG Ke-an(何琛娟，李德华，卢振中, 聂玉昕, 王学进, 袁宏韬, 冯克安). Spectroscopy and Spectral Analysis(光谱学与光谱分析), 2003, 23(3): 417.
[8] Yue J S, Cheng W J, Zhang X W, et al. Thin Solid Film, 2000, 375: 247.
[9] MA Xi-ying, HE De-yan, CHEN Guang-hua(马锡英, 贺德衍, 陈光华). Acta Physica Sinica(物理学报), 2001, 50: 2023.
[10] Zhao Y N, Wang B, Yu S, et al. Thin Solid Film, 1998, 320:220.
[11] Berns D H, Cappelli M A. J. Mater. Res., 1997, 12: 2014.
|
| [1] |
JING Jian-yuan, YUAN Liang, ZHANG Shui-qin, LI Yan-ting, ZHAO Bing-qiang*. Multispectral Structural Characterization of Humic Acid-Enhanced Urea[J]. SPECTROSCOPY AND SPECTRAL ANALYSIS, 2022, 42(08): 2610-2615. |
| [2] |
LI Huan-tong1, 2, ZHU Zhi-rong1, 2, QIAO Jun-wei1, 2, LI Ning3, YAO Zheng3, HAN Wei1, 2. Molecular Representations of Jurassic-Aged Vitrinite-Rich and
Inertinite-Rich Coals in Northern Shannxi Province by
FTIR, XPS and 13C NMR[J]. SPECTROSCOPY AND SPECTRAL ANALYSIS, 2022, 42(08): 2624-2630. |
| [3] |
LI Jin-hua1, 2, ZHANG Min-juan1, 2, WANG Zhi-bin1, 2, LI Shi-zhong1, 2*. The Effect of Instrument Resolution on Passive Ranging of Oxygen A Band[J]. SPECTROSCOPY AND SPECTRAL ANALYSIS, 2022, 42(06): 1974-1978. |
| [4] |
TANG Ming-zhu1, WANG Zhi-ying1, WANG Yun-shan2*, BAO Wei-jun2, YANG Gang2, SUN Yong3. Characterization of the Impurity Phases in Phosphogypsum by the EBSD-XPS Method[J]. SPECTROSCOPY AND SPECTRAL ANALYSIS, 2022, 42(01): 136-140. |
| [5] |
REN Shen-he1, 2, GAO Ming1*, WANG Ming-jun3, LI Yan1, GUO Lei-li3. Attenuation and Transmission Characteristics of Laser Propagation in Cirrus Clouds With a Spherical Boundary[J]. SPECTROSCOPY AND SPECTRAL ANALYSIS, 2022, 42(01): 316-321. |
| [6] |
ZHANG Ying-qiang1, ZHANG Shui-qin2, WANG Li-yan1*, YUAN Liang2, LI Yan-ting2, XIONG Qi-zhong3, LIN Zhi-an2, ZHAO Bing-qiang2*. Multispectral Structural Characterization of Low-Molecular-Weight Organic Acids Modified Urea[J]. SPECTROSCOPY AND SPECTRAL ANALYSIS, 2021, 41(10): 3129-3136. |
| [7] |
LIU Hong-fang, WANG Rui, LIAN Xia-yu, HUO Li-juan, MA Jun. Research of the Removal of SeO2-3 With Pyrite Based on XPS[J]. SPECTROSCOPY AND SPECTRAL ANALYSIS, 2021, 41(05): 1458-1462. |
| [8] |
LI Jing-jing1, 2, WU Hao-rong1, ZHANG Xiao-dong1, YU Lan1*. Study on X-Ray Photoelectron Spectroscopy of High-Temperature Vulcanized Silicone Rubber Accelerated Aging by Ultraviolet Radiation[J]. SPECTROSCOPY AND SPECTRAL ANALYSIS, 2021, 41(03): 720-726. |
| [9] |
WANG Jing-jing1, 2, TAN Tu1*, WANG Gui-shi1, ZHU Gong-dong1, XUE Zheng-yue1, 2, LI Jun1, 2, LIU Xiao-hai1, 2, GAO Xiao-ming1, 2. Research on All-Fiber Dual-Channel Atmospheric Greenhouse Gases Laser Heterodyne Detection Technology[J]. SPECTROSCOPY AND SPECTRAL ANALYSIS, 2021, 41(02): 354-359. |
| [10] |
SUN Ming-chen1,2, WU Xiao-cheng1*, GONG Xiao-yan1, HU Xiong1. Transmittance Simulation Calculation Based on 3D Ray Tracing and HITRAN Database[J]. SPECTROSCOPY AND SPECTRAL ANALYSIS, 2020, 40(07): 2092-2097. |
| [11] |
XU Yong2, XU Yan3, JIANG Zhen-dong2, HUANG Yuan-fang1, WU Xue-min2*. A Study of Adsorption Property of Containing Polyamine Anchoring Group Dispersant onto Oxadiargyl Particles Surface by Using FTIR, XPS and SEM[J]. SPECTROSCOPY AND SPECTRAL ANALYSIS, 2020, 40(05): 1431-1435. |
| [12] |
MA Li1, JIA Liang-liang1, QI Xue-min1, CHU Jie1*, ZHANG Jun-hua1, CHANG De-long2*, XU Ya-ya2. Structural Properties and Composition of Paulownia：Effect of Acetic Acid and Sodium Sulfite Combined Pretreatment[J]. SPECTROSCOPY AND SPECTRAL ANALYSIS, 2020, 40(02): 523-528. |
| [13] |
WANG Hao1, 2, JIN Bao-sheng1*, WANG Xiao-jia1, YU Bo2, CAO Jun1, Lü Dong-qiang2. Research of Texture Structure for Coke Layer in Ascension Pipe of Coke Oven Based on SEM and XPS[J]. SPECTROSCOPY AND SPECTRAL ANALYSIS, 2019, 39(11): 3333-3339. |
| [14] |
LI Xu1, 2, ZHU Gan-yu3, GONG Xiao-kang1, LI Shao-peng3, XU Wei1, LI Hui-quan3, 4*. Occurrence of the Impurities in Phosphorus Rock and the Research of Acidolysis Process[J]. SPECTROSCOPY AND SPECTRAL ANALYSIS, 2019, 39(04): 1288-1293. |
| [15] |
ZHANG Shang-lu1, 2, HUANG Yin-bo1, LU Xing-ji1, 2, CAO Zhen-song1, DAI Cong-ming1*, LIU Qiang1, GAO Xiao-ming1, RAO Rui-zhong1, WANG Ying-jian1. Retrieval of Atmospheric H2O Column Concentration Based on Mid-Infrared Inter-Band Cascade Laser Heterodyne Radiometer[J]. SPECTROSCOPY AND SPECTRAL ANALYSIS, 2019, 39(04): 1317-1322. |
|
|
|
|
