Application Progress of Holographic Lithgraphy in Fabrication of Micro-Nano Photonic Structures
WANG Xia1,2, Lü Hao1,2, ZHAO Qiu-ling1,2, ZHANG Shuai-yi1,2, TAM Wing-yim3
1. College of of Mathematics and Physics, Qingdao University of Science and Technology, Qingdao 266061, China 2. Advanced Optoelectronic Materials and Technologies Engineering Laboratory of Shandong, Qingdao 266061, China 3. Physics Department, Hong Kong University of Science and Technology, Hong Kong, China
Abstract：Micro-nano photonic structures are developing vigorously based on the progress of photonics, semiconductor physics and microfabrication technology. A series of results are achieved in structure characterization, theory, and fabrication of them. Most high quality photonic structures are man-made ones; however, there are still some challenges in fabricating artificial large-area and high-quality photon materials. With the advantages of photonic structure processing technology, holographic lithography, a low-cost, time-saving and high-efficiency microfabrication method, performs superior application potentials in making metamaterials as well as photonic crystal templates. In this article, we introduced the principles of holographic lithography and described the applications in fabricating various micro-nano photonic structures, such as three dimensional face-center-cubic, wood-pile, diamond-like photonic crystals, as well as quasi-crystalline structure, chiral metamaterials and periodic defect-mode structures. Moreover, the applications of some structures in solar cell and optical fiber sensing are discussed. The success of fabricating micro-nano photonic structures by holographic lithography would pave the way for more applications of these structures in wide fields.
[1] Zhao R, Zhang L, Zhou J, et al. Phys. Rev. B, 2011, (83): 035105. [2] Yablonovitch E. J. Opt. Soc. Am. B: Opt. Phys., 1993, 10(2): 283. [3] Joannopoulos J D, Villeneuve P R, Fan S. Nature, 1997, 386: 143. [4] Pendry J B. Phys. Rev. Lett., 2000, 85: 3966. [5] Fang N, Lee H, Sun C, et al. Science, 2005, 308: 534. [6] Driscoll T, Basov D N, Starr A F, et al. Appl. Phys. Lett., 2006, 88: 081101. [7] Yang Y, Li Q Z, Wang G P. Opt. Express, 2008, 16: 11275. [8] Li Z F, Zhao R k, Koschny T, et al. Appl. Phys. Lett., 2010, 97: 081901. [9] Phan A H, Piao M L, Park J H, et al. Appl. Opt., 2013, 52(11): 2. [10] Feng T H, Dai Q Fg, Wu L J, et al. Chin. Phys. B, 2008, 17(12): 4533. [11] Wang J, Yuan C W, Tang F Q. Chin. Phys. B, 2005, 14(8): 1581. [12] Wijnhoven J E G J, Vos W L. Science, 1998, 281: 802. [13] Kirkpatrick S M, Baur J W, Clark C. M. Appl. Phys. A, 1999, 69: 461. [14] 14 Berger V, Gauthier-Lafaye O, Costard E. Appl. Phys. Lett., 1997, 82(1): 60. [15] Campbell M, Sharp N D, Harrison T M. Nature, 2000, 6773(404): 53. [16] Liang G Q, Zhu X L, Xu Y G, et al. Adv. Mater., 2010, 22: 4524. [17] Xiong W, Xu Y, Xiao Y, et al. Photonics and Nanostructures-Fundamentals and Applications, 2015, 13: 74. [18] Li J, Yang S. Microelectronic Engineering, 2014, 128: 7. [19] Hu W, Li H Q, Cheng B Y. Opt. Lett., 1995, 20(9): 964. [20] Timothy Y M C, Ovidiu T, Sajeev J. Phys. Rev. Lett., 2005, 71: 046605. [21] Lin Y, Herman P R, Abolghasemi E L. Appl. Phys. Lett., 2005, 97: 096102. [22] Lin Y, Herman P R, Abolghasemi E L. Appl. Phys. Lett., 2005, 86: 071117. [23] Yuan K L, Harb A, Daniel R. Appl. Phys. Lett., 2008, 104(11): 11311. [24] Wang Y J. Opt. Express, 2008, 16(2): 1090. [25] Ngoc D L, Lin J H, Huang Y Y. Opt. Express, 2006, 14(22): 10746. [26] Sun H B, Shigeki M, Hiriaki M. Appl. Phys. Lett., 1999, 74(6): 786. [27] Borisov R A, Dorojkina G N, Koroteev N I. Appl. Phys. B, 1998, 67: 765. [28] Strickler J H, Webb W W. Appl. Opt., 1991, 16(22): 1780. [29] Brian H C, Sundaravel P A, Stephen B. Nature, 1999, 398: 51. [30] Park S G, Jeon T Y, Jeon H C, et al. J. Mater. Chem. C, 2014, 2(11): 1957. [31] George D, Lutkenhaus J, Lowell D, et al. Proc SPIE, 2015, 9350: 93501K. [32] Wu L, Xu Y, Wong K S. Organic and Hybrid Photonic Crystals. Springer International Publishing, 2015. 213. [33] Shen X X, Ren Y Z, Zhou Z W, et al. Remote Sensing and Smart City, 2015, 64: 349. [34] Wang X, Xu J F, Su H M. Appl. Phys. Lett., 2003, 82(14): 2212. [35] Zhong Y C, Wu L J, Su H M. Opt. Express, 2006, 14(15): 6837. [36] Miyake M, Chen Y C, Braun P V, et al. Adv. Mater., 2009, 21: 3012. [37] Lin Y, Zhai T, Zhang X. Opt. Express, 2014, 22(7): 8396. [38] Zhong Y C, Zhu S A, Su H M. Appl. Phys. Lett., 2005, 87(6): 061103-1. [39] Jun H M, Yang S, Dong W T. Opt. Express, 2006, 14(13): 6297. [40] Pang Y K, Lee J C W, Ho C T. Opt. Express, 2006, 14: 9113. [41] Tam W Y. J. Opt. A: Pure. Appl. Opt., 2007, 9: 1076. [42] Jin B P, Xu J, Yee K P. J. Opt A: Pure. Appl. Opt., 2008, 10: 085204. [43] Park S G, Miyake M, Yang S M, et al. Adv. Mater., 2011, 23(24): 2749. [44] George D, Lutkenhaus J, Lowell D, et al. Opt. Express, 2014, 22(19): 3. [45] Chan Y S, Chan C T, Liu Z Y. Phys. Rev. Lett., 1998, 80(5): 956. [46] Zito G, Piccirillo B, Santamato E. J. Opt. A: Pure. Appl. Opt., 2009, (11): 024007. [47] Zito G, Piccirillo B, Santamato E, et al. Opt. Express, 2008, 16(8): 5164. [48] Gauthier R C, Mnaymneh K. Opt. Express, 2005, 13(6): 1985. [49] Wang X, Ng C Y, Tam W Y. Adv. Mater., 2003, 15(18): 1526. [50] Notomi M, Suzuki H, Tamamura T. Phys. Rev. Lett., 2004, 92(12): 123906. [51] Roichman Y, David G G. Opt. Express, 2005, 13(14): 5434. [52] Sun X, Tao X, Ye T, et al. Appl. Phys. B, 2007，(87): 267. [53] Zhai T R, Lin Y H, Liu H M, et al. Opt. Express, 2013, 21(23): 28444. [54] Bita I, Choi T, Walsh M E, et al. Adv. Mater., 2007, (19): 1403. [55] Man W, Megens M, Steinhardt P J, et al. Nature, 2005, 436: 993. [56] Ledermann A, Cademartiri L, Hermatschweiler M, et al. Nat. Mater., 2006, (5): 942. [57] Xu J, Ma R, Wang X, et al. Opt. Express, 2007, 15(7): 4287. [58] Wang X, Xu J, Lee J C W，et al. Appl. Phys. Lett., 2006, 88(5): 051901. [59] Shen K, Jiang G, Mao W, et al. Appl. Opt., 2013, 52(26): 6474. [60] Gao W S, Tam W Y. J. Opt. A: Pure. Appl. Opt., 2011, (13): 015101. [61] Decker M, Klein M W, Wegener M, et al. Opt. Lett., 2007, 32(7): 856. [62] Wu L, Yang Z Y, Cheng Y Z, et al. Opt. Express, 2013, 21(5): 5239. [63] Smith D R, Pendry J B, Wiltshire M C K. Science, 2004，(305): 788. [64] Pang Y K, Lee J, Lee H. Opt. Express, 2005, 13(19): 7615. [65] Wang X, Gao W S, Tam W Y. Appl. Opt., 2014, 53(11): 2425. [66] Hung J, Gao W, Tam W Y. J. Opt. A: Pure. Appl. Opt., 2011, (13): 095102. [67] Liang G Q, Mao W D, Pu Y Y, et al. Appl. Phys. Lett., 2006, 89(4): 041902-1. [68] WANG Jing-li, CHEN He-ming(汪静丽, 陈鹤鸣). Acta Physica Sinica(物理学报), 2007, 56(2): 922. [69] PAN Jie-yong, LIANG Guan-quan, MAO Wei-dong, et al(潘杰勇, 梁冠全, 毛卫东, 等). Acta Physica Sinica(物理学报), 2006，55(2): 729. [70] Mao W D, Dong J W, Zhong Y C, et al. Opt. Express, 2005, (13): 2994. [71] NIAN Xiu-zhi, CHEN He-ming(年秀芝, 陈鹤鸣). Optics & Optoeleactronic Technology(光学与光电技术), 2009, (7): 23. [72] ZENG Juan, PAN Jie-yong, DONG Jian-wen, et al(曾 隽, 潘杰勇, 董建文，等). Acta Physica Sinica(物理学报), 2006，55(6): 2785. [73] Lü H, Zhao Q L, Zhang Q Y, et al. Appl. Opt., 2012, 51(3): 302. [74] Ma J, Wong K S, Li S, et al. J. Opt. Soc. Korea, 2015, 19(1): 63. [75] Ma R, Xu J, Tam W Y. Appl. Phys. Lett., 2006, (89): 081116. [76] Hung J, Kok M H, Tam W Y. Appl. Phys. Lett., 2009, (94): 014102. [77] Han C R, Tam W Y. J. Opt. A: Pure. Appl. Opt., 2012, (14): 085104.
