Calibration Procedure of Laser Confocal Micro-Raman Spectrometer
ZHAO Ying-chun1, 2, REN Ling-ling2*, WEI Wei-sheng1, YAO Ya-xuan2
1. School of Chemical Engineering, China University of Petroleum, Beijing 102249, China 2. Division of Nano-Merology and Materials Measurement, National Institute of Metrology, China, Beijing 100029, China
Abstract：As a common spectral characterization technique, Raman spectroscopy is widely used and has a specified calibration procedure. Based on laser confocal micro-Raman spectrometer, in this paper, we briefly introduced the principle, configuration and main components of Raman spectrometer. In addition, the calibration procedures were also presented, with an emphasis on the calibration of spectrometer (spectrograph) and that of excitation laser wavelength. On the basis of conventional calibration method, a novel and more accurate method was proposed to obtain the actual excitation wavelength, that is, calibration at the point of Raman shift Δν=0. Using this novel calibration method of excitation wavelength, Raman frequency shift values of sulfur were measured, and compared with the standard values from American Society Testing and Materials (ASTM). As a result, the measured values after calibration were consistent with those ASTM values, which indicated that the calibration method is accurate. Thus, a more reasonable calibration procedure of the laser confocal micro-Raman spectrometer was provided.
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