Abstract：Using the T-H solid solution made by titanium absorbed hydrogen as the cathode, the Ti-H plasma produced by the pulsed vacuum arc ion source was nonequilibrium: it contained both the component of titanium and hydrogen; there existed gradient in the radiaL, the horizontal and the time. As a result, it could not be described by a single temperature. The present paper assumed that the subsystem consisting of electrons and the subsystem consisting of other heavy particles reached equilibrium respectively, meaning that the Ti-H plasma was described by the two temperatures as electron temperature and heavy ion temperature, it was non-equilibrium two-temperature plasma. Using Culdberg-Waage dissociation equation to describe the molecular dissociation process in the system, using Saha ionization equation to describe the atomic ionization process, combining plasma’s charge quasi-neutral condition and introducing atomic emission spectroscopy as a plasma diagnostic method which would not interfere the plasma at the same time; the temperature and the particle number density of the Ti-H plasma were diagnosed. Using MATLAB as a tool, both the titanium atoms and monovalent titanium ions’ ionization were considered, and the calculated results showed that with the electtron density determined by the Stark broadening of spectral lines in advance, except the heavy particle temperature and the hydrogen number density, the Ti-H plasma’s parameters could be diagnosed fairly accurately; the accuracy of the electron density values had a great effect on the calculation results; if the heavy particle temperature could be determined in advance, the temperature and the particle number density of the Ti-H plasma could be accurately analyzed quantitatively.
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