CCD器件相对光谱响应测试仪

doi:10.3964/j.issn.1000-0593(2013)10-2865-04

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摘要：设计并实现了一种涵盖400~950 nm的全自动CCD器件相对光谱响应测试仪。分析了成像器件的相对光谱响应测试原理，采用宽光谱、高灵敏度响应的科学级光纤光谱仪QE65000作为参考探测器，基于单光路直接比较法，构建了CCD器件相对光谱响应测试仪器。该装置可全自动完成CCD器件的相对光谱响应测量，不确定度分析结果表明，该装置对CCD器件开展相对光谱响应测试的最大不确定度为6.21%，满足应用需求，可为CCD等图像传感器甄选、参数性能评价及后续整机测试提供关键数据支撑。

关键词：CCD;相对光谱响应;全自动测试;不确定度

Abstract：The auto-test equipment for relative spectral response of charge coupled devices (CCD) was designed and realized. The equipment covered the range of 400 to 950 nm. Firstly, testing theory of relative spectral response for detectors was introduced. Secondly, taking the high sensitive and broad spectral scientific spectrometer-QE65000 as reference, auto-test equipment for relative spectral response was built up by direct comparison method in the same radiation field. Uncertainty analysis showed that the maximum uncertainty of the equipment was less than 6.21%. This auto-test equipment can be used in the CCD assessment and its photoelectrical parameters testing.

Key words：CCD;Relative spectral response;Auto testing;Uncertainty

收稿日期: 2013-01-31 修订日期: 2013-04-08

中图分类号:

TN386.5

通讯作者: 周跃 E-mail: zhouy385@ciomp.ac.cn

引用本文:

闫丰，周跃^*，章明朝，陈雪 . CCD器件相对光谱响应测试仪 [J]. 光谱学与光谱分析, 2013, 33(10): 2865-2868.
YAN Feng, ZHOU Yue^*, ZHANG Ming-chao, CHEN Xue . Test Equipment for Relative Spectral Response of CCD . SPECTROSCOPY AND SPECTRAL ANALYSIS, 2013, 33(10): 2865-2868.

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