1. Key Laboratory of Luminescence and Optical Information, Ministry of Education, Institute of Optoelectronic Technology, Beijing Jiaotong University, Beijing 100044, China 2. Department of Physics, Beijing Jiaotong University, Beijing 100044, China
Abstract：SiO/SiO2 superlattices samples were prepared on Si substrates by reactive evaporation of SiO powder in vacuum or an oxygen atmosphere. The samples were annealed in nitrogen atmosphere at high temperature subsequently. And then, H+ with a dose of 3.0×1014·cm-2 and 3.0×1015·cm-2 respectively was implanted into these samples with formed Si nanocrystals at 20 keV. The PL spectra showed that the PL intensities of samples with H+ implanting dropped sharply compared with the samples without H+ implanting. The PL intensity increased gradually with increasing re-annealing temperature; and it even could exceed that of samples without H+ implanting if the dose of H+ was enough. Our further investigations showed that the varieties of the PL intensities were mainly dependent on the area density of the defects formed in the samples, and also the area density of the defects was influenced by the dose of H+ and the further re-annealing temperatures.
[1] Canham L T. Appl. Phys. Lett., 1990, 57: 1046. [2] Lockwood D J, Lu Z H, Baribeau J M. Phys. Rev. Lett., 1996, 76: 539. [3] Wu X L, Siu G G, Tong S, et al. Appl. Phys. Lett.,2001, 78: 3058. [4] Yi L X，Heitmann J，Scholz R，et al. Appl. Phys. Lett.,2002, 81: 4249. [5] Wilkinson A R，Elliman R G. Appl. Phys. Lett.,2003, 83: 5512. [6] Cheyan S，Elliman R G. Appl. Phys. Lett.,2001, 78: 1912. [7] ZHOU Guo-yun, GAO Wei-dong, XU Guo-ding，et al( 周国运, 高卫东，徐国定，等). Spectroscopy and Spectral Analysis(光谱学与光谱分析),2001,21(4): 441. [8] WANG Juan, ZHANG Chang-rui, FENG Jian，et al(王 娟，张长瑞，冯 坚，等). Spectroscopy and Spectral Analysis(光谱学与光谱分析),2005,25(7): 1045. [9] Min K S, Shcheglov K V, Yang C M, et al. Appl. Phys. Lett., 1996, 69: 2033. [10] Zacharias M, Heitmann J, et al. Appl. Phys. Lett.,2002，80：663.
