A Micro-Silicon Multi-Slit Spectrophotometer Based on MEMS Technology
HAO Peng1, 2, WU Yi-hui1*, ZHANG Ping1, LIU Yong-shun1, ZHANG Ke1, 2, LI Hai-wen1
1. National Key Lab of Applied Optics, Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences, Changchun 130033, China 2. Graduate University of Chinese Academy of Sciences, Beijing 100039, China
Abstract：A new mini-spectrophotometer was developed by adopting micro-silicon slit and pixel segmentation technology, and this spectrophotometer used photoelectron diode array as the detector by the back-dividing-light way. At first, the effect of the spectral bandwidth on the tested absorbance linear correlation was analyzed. A theory for the design of spectrophotometer’s slit was brought forward after discussing the relationships between spectrophotometer spectrum band width and pre-and post-slits width. Then, the integrative micro-silicon-slit, which features small volume, high precision, and thin thickness, was manufactured based on the MEMS technology. Finally, a test was carried on linear absorbance solution by this spectrophotometer. The final result showed that the correlation coefficients were larger than 0.999，which means that the new mini-spectrophotometer with micro-silicon slit pixel segmentation has an obvious linear correlation.
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