Model Building and Optimization of Ultrathin Silver Films by Spectroscopic Ellipsometry
CAO Chun-bin1,CAI Qi2,SONG Xue-ping2,SUN Zhao-qi2
1. School of Sciences, Anhui Agricultural University, Hefei 230036, China 2. School of Physics and Materials Science, Anhui University, Hefei 230039, China
Abstract：Ultrathin silver films (4.0, 6.2, 12.5, 26.2, 30.0 and 40.6 nm) were prepared by direct current sputtering deposition. The thicknesses and optical constants of the films were studied by spectroscopic ellipsometry. The Drude model combined with Lorentz Oscillator model was used in the optimization of the ellipsometric data. The results show that surface plasma resonance absorption (SPR) peaks appear in the spectra of extinction coefficient k for samples 1, 2, 3 and 4. The peak shifts to shorter wavelength with the reduction in film thickness. The wavelengths of the SPR for different films were calculated by the SPR theory and also compared with the experimental data.
曹春斌1,蔡琪2,宋学萍2,孙兆奇2. 超薄Ag膜的椭偏光谱建模及解谱[J]. 光谱学与光谱分析, 2008, 28(05): 995-998.
CAO Chun-bin1,CAI Qi2,SONG Xue-ping2,SUN Zhao-qi2. Model Building and Optimization of Ultrathin Silver Films by Spectroscopic Ellipsometry. SPECTROSCOPY AND SPECTRAL ANALYSIS, 2008, 28(05): 995-998.
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