Abstract:Bi4Ti3O12(BIT) and Bi3.25La0.75Ti3O12(BLT) precursor solutions were prepared using metal-organic deposition method. BIT and BLT ferroelectric thin films were grown on the polished single crystal Si substrates. Dry gel powders of precursor solution and ferroelectric thin films were analyzed by FTIR spectrum,Raman spectrum and ESEM. The results show that crystal structure was translated completely from pyrochlore to perovskite at about 600 ℃. The dimension of crystal particles enlarges with the increase in annealing temperature. The peaks of Ti—O and Bi—O bond shift to lower wavenumbers because of introducing La into Bi4Ti3O12,and this phenomenon becomes distinct with rising temperature. When the heat treatment temperature is 500 ℃,CH3OCH2CH2OH and CH3COCH2COCH3 in dry gel completely decompose and volatilize. Water molecules volatilize and nitrate ions decompose completely over 600 ℃.
Key words:Bi4Ti3O12;Bi3.25La0.75Ti3O12;MOD;Ferroelectric thin films
[1] Park B H,Kang B S,Bu S D. Nature,1999,401(6754): 682. [2] Wang G S,Meng X J,Lai Z Q. Appl. Phys. A,2003,76(1): 83. [3] Uchida Hiroshi,Okada Isao,Matsuda Hirofumi. Integrated Ferroelectrics,2003,748: 87. [4] Kingon A L,Srinivasan S. Nature Materials,2005,4(3): 233. [5] Hou Y,Xu X H,Wang H,et al. Appl. Phys. Lett.,2001,78(12): 1733. [6] Wu D,Li A,Zhu T,et al. J. Appl. Phys.,2000,88(10): 5941. [7] Chon U,Yi G C,Jang H M. Appl. Phys. Lett.,2001,78(5): 658. [8] Francombe M H,Krishnaswamy S V. Journal of Vacuum Science and Technology A,1990,8(3): 1382. [9] Kaneko N,Yamamoto K,Tsukamoto T. Appl. Phys. Lett.,1993,63(8): 1050. [10] Wu W B,Oishi Y I,Okuyama M R,et al. Journal of the Korean Physical Society,1996,29(11): 660. [11] Joshi P C,Krupanidhi S B. J. Appl. Phys.,1996,80(4): 2349. [12] Tohge N,Fukuda Y,Minami T. Jpn. Journal of Appl. Phys.,1992,31(12A): 4016. [13] ZHENG Huai-li,ZHANG Jun-hua,LI Hong,et al(郑怀礼,张峻华,李 宏,等). Spectroscopy and Spectral Analysis(光谱学与光谱分析),2005,25(12): 2065. [14] HAN Hui,WANG Min,XU Xiao-hong,et al(韩 辉,王 民,许效红,等). Bulletin of the Chinese Ceramic Society(硅酸盐通报),2004,23(2): 86. [15] KAN Yan-mei,WANG Pei-ling,LI Yong-xiang(阚艳梅,王佩玲,李永祥). Journal of Inorganic Materials(无机材料学报),2002,17(5): 1063.