光学玻璃基底原子层同质材料沉积薄膜光谱及激光诱导损伤特性研究
程海鹏1,2, 耿锋2, 刘民才2, 张清华2, 李亚国1,*

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CHENG Hai-peng1,2, GENG Feng2, LIU Min-cai2, ZHANG Qing-hua2, LI Ya-guo1,*
ALD沉积SiO2薄膜的厚度与生长循环的关系, 生长速率为0.1 nm·cycle-1