提高红外微测辐射热计光谱吸收率的金属光栅结构研究
张宇峰1, 王洋1, 吴元庆1, 戴景民2

Study on Metal Grating Structure for Improving Spectral Absorptivity of Infrared Microbolometer
ZHANG Yu-feng1, WANG Yang1, WU Yuan-qing1, DAI Jing-min2
(a)光栅高度对光谱吸收率的影响; (b)光栅高度对吸收峰的影响