光栅光谱衍射效率测量新技术的误差分析与校正方法研究

王圣浩¹, 邵建达^1,^2,³, 刘世杰^1,^*, 李灵巧^1,^*, 吴周令^2,³, 陈坚^2,³, 黄明^2,³

Error Analysis of the New Measurement Technique for Obtaining the Spectral Diffraction Efficiencies of a Grating

WANG Sheng-hao¹, SHAO Jian-da^1,^2,³, LIU Shi-jie^1,^*, LI Ling-qiao^1,^*, WU Zhou-ling^2,³, CHEN Jian^2,³, HUANG Ming^2,³

(a)光栅光谱衍射效率测量系统的实物图, (b)测量系统的关键几何尺寸