芯片级硅基光谱仪研究进展
, 金里Research Progress of On-Chip Spectrometer Based on the Silicon Photonics Platform
WANG Wei-ping1, * , JIN Li2
, JIN Li
芯片级硅基光谱仪研究进展 |
|
王伟平, 金里 |
Research Progress of On-Chip Spectrometer Based on the Silicon Photonics Platform |
|
WANG Wei-ping
, JIN Li |
| (a) 迈克尔逊干涉仪的光学实验台, 光学和光机器件置于平台上且光线在平台内传播; (b) 微机械迈克尔逊干涉仪的单片集成[ 12 ] BS: 分束器; M: 镜子 |
| |