双路微波耦合反应腔的等离子体发射光谱分析
李方辉, 何中文, 曹为, 赵洪阳, 付秋明, 许传波, 马志斌*

Plasma Emission Spectroscopy Analysis of Two-Way Microwave Coupled Reaction Cavity
LI Fang-hui, HE Zhong-wen, CAO Wei, ZHAO Hong-yang, FU Qiu-ming, XU Chuan-bo, MA Zhi-bin*
(a) L =61.2 mm时石英管内电场等值面模拟结果; (b)两路矩形波导的距离对 Z 轴等离子体发射光谱的影响