双路微波耦合反应腔的等离子体发射光谱分析

李方辉, 何中文, 曹为, 赵洪阳, 付秋明, 许传波, 马志斌^*

Plasma Emission Spectroscopy Analysis of Two-Way Microwave Coupled Reaction Cavity

LI Fang-hui, HE Zhong-wen, CAO Wei, ZHAO Hong-yang, FU Qiu-ming, XU Chuan-bo, MA Zhi-bin^*

石英管内 YZ 平面上电场分布图 (a): L =53.2 mm, H =194 mm; (b): L =61.2 mm, H =194 mm;(c): L =61.2 mm, H =202 mm