低压氩气电感耦合等离子体特性分析及光谱诊断
, 徐浩军, 魏小龙, 陈增辉, 宋飞龙, 张文远 Characteristics Study and Parameters Diagnosis by Spectral Analysis of Low Pressure Argon Inductively Coupled Plasma
SONG Zhi-jie, XU Hao-jun, WEI Xiao-long, CHEN Zeng-hui, SONG Fei-long, ZHANG Wen-yuan
, XU Hao-jun, WEI Xiao-long, CHEN Zeng-hui, SONG Fei-long, ZHANG Wen-yuan 