基于可变相位延迟的激光干涉式亚纳米级微位移测量系统
刘通1,2, 张刘1,*, 张冠宇1, 陈晨1,*, 仲志成1

A Laser Interferometric Subnano-Scale Micro-Displacement Measurement System Based on Variable Phase Retardation
LIU Tong1,2, ZHANG Liu1,*, ZHANG Guan-yu1, CHEN Chen1,*, ZHONG Zhi-cheng1
系统以10 nm间隔的时域位移测量结果(主图)及其对应测量值的线性拟合(右上子图)