射频容性耦合等离子体放电特性的光谱诊断
刘冲1, 何湘1,*, 张亚春2, 陈建平3, 陈玉东3, 曾小军3, 陈秉岩1, 朱卫华1

Spectroscopic Diagnostics on Discharge Characteristics of RF Capacitive Coupled Plasma
LIU Chong1, HE Xiang1,*, ZHANG Ya-chun2, CHEN Jian-ping3, CHEN Yu-dong3, ZENG Xiao-jun3, CHEN Bing-yan1, ZHU Wei-hua1
由玻尔兹曼斜率法计算得到的等离子体电子激发温度