%A DUAN Liang-fei;YANG Wen;ZHANG Li-yuan;LI Xue-ming;CHEN Xiao-bo;YANG Pei-zhi;* %T Study on the Properties of the Pc-Si Films Prepared by Magnetron Co-Sputtering at Low Temperature %0 Journal Article %D 2016 %J SPECTROSCOPY AND SPECTRAL ANALYSIS %R 10.3964/j.issn.1000-0593(2016)03-0635-05 %P 635-639 %V 36 %N 03 %U {https://www.gpxygpfx.com/CN/abstract/article_8241.shtml} %8 2016-03-01 %X The polycrystalline silicon thin films play an important role in the field of electronics. In the paper, α-SiAl composite membranes on glass substrates was prepared by magnetron co-sputtering. The contents of Al radicals encapsulated in the α-Si film can be adjusted by changing the Al to Si sputtering power ratios. The as-prepared α-Si films were converted into polycrystalline films by using a rapid thermal annealing (RTP) at low temperature of 350 ℃ for 10 minutes in N2 atmosphere. An X-ray diffractometer, and Raman scattering and UV-Visible-NIR Spectrometers were used to characterize the properties of the Pc-Si films. The influences of Al content on the properties of the Pc-Si films were studied. The results showed that the polycrystalline silicon films were obtained from α-SiAl composite films which were prepared by magnetron co-sputtering at a low temperature following by a rapid thermal annealing. The grain size and the degree of crystallization of the Pc-Si films increased with the increase of Al content, while the optical band gap was reduced. The nc-Si films were prepared when the Al to Si sputtering power ratio was 0.1. And a higher Crystallization rate (≥85%) of polycrystalline silicon films were obtained when the ratio was 0.3. The band gaps of the polycrystalline silicon films can be controlled by changing the aluminum content in the films.