基于B样条的TERS形貌成像背景扣除方法

doi:10.3964/j.issn.1000-0593(2018)02-0394-07

Abstract
References
Related Citation (5)

Download: PDF (5193 KB)
Export: BibTeX | EndNote (RIS)

Abstract In the topography imaging of Tip-Enhanced Raman Spectroscopy, the difficulty of keeping the tip and the scan stage absolutely parallel, the fast change of the height of the tip due to the quick variety of the electron density, and the long response time of the scanning control system result in imaging background with inclined or boundary curly. Imaging background would bring a negative impact to the identification and analysis of the sample’s topographic image，while background subtraction is an important means to solve this problem, which is also an important part of topographic image’s preprocessing. The general principle of background subtraction is to fit the topographic image’s background firstly and then subtract it from the image. The traditional fitting method is polynomial fitting line by line, but this method will always destroy the sample’s actual spatial topography by over-fitting, and it is prone to leave clear line texture on the image. In this paper, the traditional method was improved, and the B-spline surface fitting method was used to approach the background of topographic image through constant iteration. The advantage of B-spline surface, namely low-order and smoothness, can help the method overcome the disadvantages of traditional polynomial method. In the experiments, the topographic image of Au (111) single-crystal and synthetic golden slice were detected, and then the proposed method and the traditional method were applied to perform background subtraction. Experimental results showed that the proposed method can eliminate the topographic image’s background effectively without destroying the sample’s actual spatial topography by over-fitting and leaving line texture on the image. Therefore, the proposed method provided more accurate and reliable information for the further analysis of topographic images, and it’s a more effective background subtraction method of TERS topography imaging.

Key words：背景扣除；TERS成像；形貌图；B样条曲面

Received: 2016-08-17 Accepted: 2017-05-29

ZTFLH:

O657.37

Corresponding Authors: WANG Xin E-mail: xinwang@xmu.edu.cn

Cite this article:

URL:

https://www.gpxygpfx.com/EN/10.3964/j.issn.1000-0593(2018)02-0394-07 OR https://www.gpxygpfx.com/EN/Y2018/V38/I02/394

[1] WANG Rui, HAO Feng-huan, ZHANG Ming-qian, et al(王瑞，郝凤欢，张明倩，等). Leser & Optoelectronics Progress(激光与光电子学进展), 2010, 47(031601): 1.
[2] WEI Qiang, ZHANG Yu-lin, SONG Hui-ying, et al(魏强，张玉林，宋会英，等). Micronanoelectronic Technology(微纳米电子技术)，2005, 9：425.
[3] FEN Yi, ZHAO Jun-wu, GAO Fen(冯异，赵军武，高芬). Science Technology and Engineering(科学技术与工程)，2006, 13(6)：1872.
[4] LIU An-ping, GUO Hong-hua, ZHU Kun, et al(刘安平，郭红华，朱坤，等). Journal of Chinese Electron Microscopy Society(电子显微学报), 2009, 28(2)：116.
[5] ZHU Min-hao, WU Xue-jian, WEI Hao-yun, et al(朱敏昊，吴学健，尉昊赟，等). Acta Phys. Sin.(物理学报)，2013, 62(070702): 1.
[6] LAI Zhi-lin, LIU Xiang-dong, GENG Jie, et al(赖志林，刘向东，耿洁，等). Optics and Precision Engineering(光学精密工程)，2011, 19(6): 1281.
[7] WANG Wen-ke, LI Si-kun(王文珂，李思昆). Journal of Computer-Aided Design & Computer Graphics(计算机辅助设计与图形学学报)，2013, 25(5)：679.
[8] Piegl L, Tiller W. The NURBS Book (非均匀有理B样条). Translated by ZHAO Gang, MU Guo-wang, WANG La-zhu(赵罡，穆国旺，王拉柱，译). Beijing: Tsinghua University Press(北京：清华大学出版社), 2010. 60.
[9] SHI Fa-zhong(施法中). CAGD & NURBS (计算机辅助几何设计与非均匀有理B样条). Beijing: Higher Education Press(北京：高等教育出版社), 2013. 303.
[10] LIU Jing-nan, ZENG Wen-xian, XU Pei-liang(刘经南，曾文宪，徐培亮). Geomatics and Information Science of Wuhan Uniiversity(武汉大学学报·信息科学版)，2013, 38(5)：505.
[11] WEI Guo, LIU Jian, LEI Miao, et al(魏国，刘剑，雷苗，等). Chinese Journal of Scientific Instrument(仪器仪表学报)，2009, 30(7)：1404.
[12] Renner G, Wei V. Computer-Aided Design, 2004，36：351.
[13] Patrizia Ciarlini, Daniela Ichim. Measurement, 2006，39：815.
[14] Clavilier J, Faure R, Guinet G，et al. J. Electroanal. Chem., 1980, 107：205.
[15] Deckert-Gaudig T, Deckert V. Small，2009, 5：432.