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SPECTROSCOPY AND SPECTRAL ANALYSIS  2016, Vol. 36 Issue (10): 3265-3268    DOI: 10.3964/j.issn.1000-0593(2016)10-3265-04
光谱学与光谱分析 |
Thickness Calculation of Silicon Dioxide Nano-Film Based on GIXRR Reflectivity Curve
MA Yi-bo1,2, WANG Mei-ling2, WANG Hai2*, YUAN Pei1, FAN Yan1,2, XING Hua-chao1,2, GAO Si-tian2
1. College of Chemical Engineering, China University of Petroleum (Beijing), Beijing 102249, China2. National Institute of Metrology,China, Beijing 100029, China