光谱学与光谱分析 |
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Progress in the Application of Laser Ablation ICP-MS to Surface Microanalysis in Material Science |
ZHANG Yong1, JIA Yun-hai1*, CHEN Ji-wen1, SHEN Xue-jing1, LIU Ying2, ZHAO Lei2, LI Dong-ling1, HANG Peng-cheng3, ZHAO Zhen3, FAN Wan-lun4, WANG Hai-zhou1 |
1. Central Iron & Steel Research Institute,Beijing 100081,China 2. General Research Institute for Nonferrous Metals,Beijing 100088,China 3. NCS Testing Technology Co., Ltd., Beijing 100094,China 4. Chongqing DAQO New Energy Co., Ltd.,Chongqing 404000,China |
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Abstract In the present paper, apparatus and theory of surface analysis is introduced, and the progress in the application of laser ablation ICP-MS to microanalysis in ferrous, nonferrous and semiconductor field is reviewed in detail. Compared with traditional surface analytical tools, such as SEM/EDS (scanning electron microscopy/energy dispersive spectrum), EPMA (electron probe microanalysis analysis), AES (auger energy spectrum), etc. the advantage is little or no sample preparation, adjustable spatial resolution according to analytical demand, multi-element analysis and high sensitivity. It is now a powerful complementary method to traditional surface analytical tool. With the development of LA-ICP-MS technology maturing, more and more analytical workers will use this powerful tool in the future, and LA-ICP-MS will be a super star in elemental analysis field just like LIBS (Laser-induced breakdown spectroscopy).
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Received: 2013-09-16
Accepted: 2013-12-05
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Corresponding Authors:
JIA Yun-hai
E-mail: jyh@analysis.org.cn
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