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SPECTROSCOPY AND SPECTRAL ANALYSIS  2014, Vol. 34 Issue (07): 1789-1792    DOI: 10.3964/j.issn.1000-0593(2014)07-1789-04
光谱学与光谱分析 |
Effects of Annealing Temperature on the Structure and Optical Properties of ZnMgO Films Prepared by Atom Layer Deposition
SUN Dong-xiao1, LI Jin-hua1*, FANG Xuan1, 2, CHEN Xin-ying1, FANG Fang1, CHU Xue-ying1, WEI Zhi-peng1, 2, WANG Xiao-hua1
1. School of Science, Changchun University of Science and Technology, Changchun 130022, China2. International Joint Research Center for Nanophotonics and Biophotonics, Changchun 130022, China