| 光谱学与光谱分析 |
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| Determination of Film Thickness, Component and Content Based on Glass Surface by Using XRF Spectrometry |
| MEI Yan1, MA Mi-xia2, NIE Zuo-ren1 |
1. College of Materials Science and Engineering, Beijing University of Technology, Beijing 100124, China
2. Special Education College of Beijing Union University, Beijing 100075, China |
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Abstract Film thickness, component and content based on glass surface were determined by using XRF technic, measure condition and instrument work condition in every layer were set and adjusted for the best measure effect for every element. Background fundamental parameter (BG-FP) method was built up. Measure results with this method were consistent with the actual preparation course and the method could fit to production application.
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Received: 2013-01-19
Accepted: 2013-06-12
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Corresponding Authors:
MEI Yan
E-mail: meiyan@bjut.edu.cn
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