光谱学与光谱分析 |
|
|
|
|
|
Spectral Analysis of Effects of Annealing on the Characteristics of Intrinsic SnO2 Polycrystalline Thin Films |
ZENG Guang-gen,ZHENG Jia-gui*,LI Bing,CHEN Qi,WU Li-li,LI Wei,ZHANG Jing-quan,LEI Zhi,CAI Ya-ping,CAI Wei,FENG Liang-huan |
Department of Materials Science, Sichuan University, Chengdu 610064, China |
|
|
Abstract In order to improve the conversion efficiency of the CdTe solar cells, it is necessary to decrease the thickness of CdS layer. However, the decrease in CdS thickness may lead to adverse effects on the solar cells. Therefore, a high-resistance transparent layer (intrinsic SnO2) has been used as a buffer layer between the transparent conducting oxide (TCO) and CdS layer. In the present paper, SnO2 polycrystalline thin films were prepared by magnetic reactive sputtering. The properties of the films before and after annealing were studied by XRD and XPS. The results revealed that the films annealed at 550 ℃ for 30 minutes are polycrystalline SnO2 with a single phase of tetragonal structure and have orientation of (110) direction. XPS investigation shows that after annealing the oxygen content of the film increases, O1s peak shifts to lower energies, and SnO is oxidized into SnO2,After annealing the intrinsic SnO2 films of high-resistance as a buffer layer are very suitable for the CdTe solar cells.
|
Received: 2007-05-10
Accepted: 2007-08-20
|
|
Corresponding Authors:
ZHENG Jia-gui
E-mail: zjgcd@sohu.com
|
|
[1] Spence W. Journal of Applied Physics, 1967,38: 3767. [2] Philips H M, Li Y J, Bi Z Q, et al. Applied Physics A, 1996,63: 347. [3] Rajpure K Y, Kusumade M N, et al. Materials Chemistry and Physics,2000,64: 184. [4] Kennedy M K, Kruis F E, Fissan H, et al. Journal of Applied Physics,2003,93: 551. [5] YAO Fei-fei,FENG Liang-huan,CHEN Wei-dong, et al(姚菲菲,冯良桓,陈卫东, 等). Semiconductor Optoelectronics(半导体光电),2007,28(3):367. [6] Sekhar C Ray, Malay K Karanjai. Thin Solid Films, 1997,307(2): 221. [7] Jin Ma, Xiao tao Hao, Shu lai Huang,et al. Applied Surface Science,2003,214(1~4): 208. [8] Terrier C,Chatelon J P, Roger J A. Thin Solid Films, 1997,295(1): 95. [9] Amanullah F M, Saleh Al Mobarak M, Al Dhafiri A M, et al. Material Chemistry and Physics, 1999,59: 247. [10] Wang Jing-qin, Wang Hai-tao, Wen Ming, et al. Journal of Zhejiang University Science A(Science in Engineering),2007, 8(3): 459. [11] Masayuk, Dkyua, Shojikaneko, et al. European Ceramic Society,2000,21: 2099. [12] Patil Pramod S. Material Chemistry and Physics, 1999,59: 185. [13] CHEN Wei-dong, FENG Liang-huan, LEI Zhi, et al(陈卫东, 冯良桓, 雷 智, 等). Chinese Journal of Semiconductors(半导体学报),2006,27(3): 541. [14] ZHANG Zhong-suo, ZHANG Xing-tang, CHEN Yan-hui, et al(张忠锁, 张兴堂, 陈艳辉, 等). Spectroscopy and Spectral Analysis(光谱学与光谱分析),2003,23(1): 98. [15] Moulder J F, Stickle W F, Sobol P E, et al. Minnesota Physical Electronics Inc. Minnesota: Physical Electronics Inc., 1995. [16] CAO Li-xin, WAN Hai-bao, WANG Shu-bin, et al(曹立新, 万海保, 王淑彬,等). Spectroscopy and Spectral Analysis(光谱学与光谱分析),1999, 19(5): 651. [17] WANG Lei,DU Jun,MAO Chang-hui, et al(王 磊,杜 军,毛昌辉,等). Surface Technology(表面技术),2005, 34(5):34. [18] ZHU Yue-xiu,WANG De-miao(朱月秀,王德苗). Journal of Materials Science & Engineering(材料科学与工程学报),2002 20(1):73. [19] CHEN Meng, PEI Zhi-liang, BAI Xue-dong, et al(陈 猛,裴志亮,白雪冬,等). Journal of Inorganic Materials(无机材料学报),2000, 15(1):189. [20] ZENG Guang-gen, ZHENG Jia-gui, LI Bing, et al(曾广根,郑家贵,黎 兵,等). Acta Physica Sinica(物理学报),2006, 55(9):4856. [21] Wu X, Keane J C, Dhere R G, et al. 17th European Photovoltaic Solar Energy Conference,2001,22.
|
[1] |
FAN Chun-hui1, 2, ZHENG Jin-huan3, LIU Hong-xin1. FTIR, 2D-IR and XPS Analyses on the Mechanism of Protoplast Derived From Calendula Officinalis in Response to Lead and Cadmium in Soil[J]. SPECTROSCOPY AND SPECTRAL ANALYSIS, 2022, 42(05): 1420-1425. |
[2] |
HE Xiong-fei1, 2, HUANG Wei3, TANG Gang3, ZHANG Hao3*. Mechanism Investigation of Cement-Based Permeable Crystalline Waterproof Material Based on Spectral Analysis[J]. SPECTROSCOPY AND SPECTRAL ANALYSIS, 2021, 41(12): 3909-3914. |
[3] |
LI Ping1,2, WU Yi-qiang1, LÜ Jian-xiong3, YUAN Guang-ming1, ZUO Ying-feng1*. Effect of Biomimetic Respiration Method on the Impregnation Effect of Silicate Modified Chinese Fir by XPS and FTIR Analysis[J]. SPECTROSCOPY AND SPECTRAL ANALYSIS, 2021, 41(05): 1430-1435. |
[4] |
GE Tao1, 2, LI Yang1, Wang Meng2, CHEN Ping3, MIN Fan-fei1, ZHANG Ming-xu1. Spectroscopic Characterization of Carbon Structure in High Sulfur Fat Coal[J]. SPECTROSCOPY AND SPECTRAL ANALYSIS, 2021, 41(01): 45-51. |
[5] |
GE Tao1,2, LI Yang1, WANG Meng2, LI Fen1, ZHANG Ming-xu1. Structural Characterization and Molecular Model Construction of Gas-Fat Coal With High Sulfur in Shanxi[J]. SPECTROSCOPY AND SPECTRAL ANALYSIS, 2020, 40(11): 3373-3378. |
[6] |
LIU Xiu-yu, ZHANG Bing, ZHANG Hao, DU Xiao-yan, TANG Gang*. Research of Flame Retardant Mechanism for RPUF/EG Composites Based on TG-FTIR and XPS[J]. SPECTROSCOPY AND SPECTRAL ANALYSIS, 2020, 40(05): 1626-1633. |
[7] |
GE Tao1,3, CAI Chuan-chuan1, CHEN Ping3, MIN Fan-fei1, ZHANG Ming-xu1. The Characterization on Organic Sulfur Occurrence in Coking Coal and Mechanism of Microwave Actionon Thiophene[J]. SPECTROSCOPY AND SPECTRAL ANALYSIS, 2020, 40(04): 1321-1327. |
[8] |
WANG Shi-xia, GAO Jin-jin. Study on the Influence of Pb Doping on High Pressure Structural Properties of Tin Dioxide Using Diamond Anvil Cell and Raman Spectra[J]. SPECTROSCOPY AND SPECTRAL ANALYSIS, 2020, 40(02): 415-419. |
[9] |
GE Tao1, ZHANG Ming-xu1, MA Xiang-mei2. XPS and FTIR Spectroscopy Characterization about the Structure of Coking Coal in Xinyang[J]. SPECTROSCOPY AND SPECTRAL ANALYSIS, 2017, 37(08): 2406-2411. |
[10] |
DONG Jun, REN Li-ming, CHI Zi-fang*, HU Wen-hua . Analysis of XPS in the Removal of Cr(Ⅵ) from Groundwater with rGO-nZⅥ[J]. SPECTROSCOPY AND SPECTRAL ANALYSIS, 2017, 37(01): 250-255. |
[11] |
LU Bao-qi, XU Yao-xian, SHEN Guang-yao, JI Jiang-hua, WANG Lin-jun. Raman Spectra Study on the Structure and Thermal Stability of Vacuum Annealed Cr-DLC Films Prepared with UBMS[J]. SPECTROSCOPY AND SPECTRAL ANALYSIS, 2016, 36(11): 3568-3571. |
[12] |
QIU Li-mei, XU Guang-tong* . The Application of X-Ray Photoelectron Spectroscopy on Refining Catalyst[J]. SPECTROSCOPY AND SPECTRAL ANALYSIS, 2015, 35(12): 3514-3518. |
[13] |
ZHAO Hong-tao1, 2, 3, LI Hui-quan1*, BAO Wei-jun1, WANG Chen-ye1, LI Song-geng3*, LIN Wei-gang3 . Spectral Analysis of Trace Fluorine Phase in Phosphogypsum [J]. SPECTROSCOPY AND SPECTRAL ANALYSIS, 2015, 35(08): 2333-2338. |
[14] |
WANG Lei1, LIU Chang-sheng2, SHI Lei2, AN Cheng-qiang1 . Spectroscopic Study on Film Formation Mechanism and Structure of Composite Silanes-V-Zr Passive Film[J]. SPECTROSCOPY AND SPECTRAL ANALYSIS, 2015, 35(02): 453-456. |
[15] |
LIU Hong-fang1, 2, QIAN Tian-wei1*, ZHANG Min-gang2* . Analysis of XPS in the Removal of Se(Ⅳ) from Groundwater with Pyrite [J]. SPECTROSCOPY AND SPECTRAL ANALYSIS, 2015, 35(02): 543-546. |
|
|
|
|