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SPECTROSCOPY AND SPECTRAL ANALYSIS  2011, Vol. 31 Issue (12): 3185-3189    DOI: 10.3964/j.issn.1000-0593(2011)12-3185-05
光谱学与光谱分析 |
The Influence of Laser Plasma Effects on the Characteristics of Silicon Surface Damage
FAN Wei-xing1,2,HAN Jing-hua1,LI Hai-bo3, YANG Li-ming3, FENG Guo-ying1*,GAO Xiang1,LIU Yan-yan1, BAO Ling-dong1,HUANG Yong-zhong1
1. College of Electronics & Information Engineering, Sichuan University, Chengdu 610064,China2. Optimal Coatech Corporation Limited, Guangzhou 510730, China3. Fine Optical Engineering Research Center, Chengdu 610041, China