光谱学与光谱分析 |
|
|
|
|
|
Diagnostics of Atmospheric-Pressure Radio-Frequency Capacitively Coupled Ar/N2 Plasma by Optical Emission Spectroscopy |
LI Shou-zhe, WU Qi, XU Mao-chun, LI Hong, WANG Yong-xing |
School of Physics & Optoelectronic Technology, Dalian University of Technology, Dalian 116024, China |
|
|
Abstract An atmospheric-pressure Ar/N2 glow discharge was achieved in α mode stricken between bare metal plate electrodes by radio-frequency power supply at 13.56 MHz. The rotational temperature was determined by using the Boltzmann plot of the OH (A 2Σ+→X 2Π) radical and the variation tendency of the gas temperature versus the input power was obtained. Furthermore, the measurement of the sequences of vibrational bands of N2 second positive system (C 3Πu→B 3Πg) is made and the vibrational temperature was determined correspondingly. The experiment results showed that the emission peaks of N2 (C 3Πu) reached the maximum at the nitrogen flow rate of 80 mL·min-1 with increasing addition of nitrogen, the gas temperature increased from 342 to 523 K when the input power increased from 30 to 210 W, and the vibrational temperature changed slightly when the gas flow rate of nitrogen increased from 30 to 140 mL·min-1.
|
Received: 2010-11-30
Accepted: 2011-03-12
|
|
Corresponding Authors:
LI Shou-zhe
E-mail: lisz@dlut.edu.cn
|
|
[1] Schutze A, Jeong J Y, Babayan S E, et al. IEEE Trans. Plasma Sci., 1998, 26: 1685. [2] Laroussi M. Plasma Process Polym., 2005, 2: 391. [3] Babayan S E, Jeong J Y, Tu V J, et al. Plasma Sources Sci. Technol., 1998, 7(3): 286. [4] Babayan S E, Jeong J Y, Schütze A, et al. Plasma Sources Sci. Technol., 2001, 10(4): 573. [5] Wang S, Schulz-vonder G V, Dobele H F. Appl. Phys. Lett., 2003, 83(16): 3272. [6] Lim J P, Uhm H S, Li S Z. Appl. Phys. Lett., 2007, 90: 051504. [7] Wang H B, Sun W T, Li H P, et al. Appl. Phys. Lett., 2006, 89: 161504. [8] Li Shouzhe, Huang Wentong, Wang Dezhen. Phys. Plasmas, 2009, 16: 093501. [9] Pellerin S, Cormier J M, Richard F, et al. J. Phys. D: Appl. Phys., 1996, 29: 726. [10] Herzberg G(赫兹堡). Molecular Spectra Molecular Structure, Ⅰ(分子光谱与分子结构,第1卷). Beijing: Science Press(北京:科学出版社), 1983. [11] Kang Zhengde, Pu Yikang. Chin. Phys. Lett., 2002, 19(2): 211. [12] Macko P, Martiíovití V, Veis P. Czechoslovak. J. Phys.,2001, 51(5): 491. [13] Masoud N, Martus K, Figus M, et al. Contrib. Plasma Phys.,2005, 45(1): 30. [14] Shemansky D E, Broadfoot A L. Quant. Spectrosc. Radiat. Transfer, 1971, 11: 1385. [15] Peter Bruggeman, Felipe Iza, Peter Guns, et al. Plasma Sources Sci. Technol., 2010, 19: 015016. [16] Li Shouzhe, Huang Wentong, Wang Dezhen. Phys. Plasmas, 2009, 16: 093501. [17] Laux C O, Spence T G, Kruger C H, et al. Plasma Sources Sci. Technol., 2003, 12: 125. |
[1] |
YU Hao-zhang, WANG Fei-fan, ZHAO Jian-xun, WANG Sui-kai, HE Shou-jie*, LI Qing. Optical Characteristics of Trichel Pulse Discharge With Needle Plate
Electrode[J]. SPECTROSCOPY AND SPECTRAL ANALYSIS, 2023, 43(10): 3041-3046. |
[2] |
TIAN Fu-chao1, CHEN Lei2*, PEI Huan2, BAI Jie-qi1, ZENG Wen2. Diagnosis of Emission Spectroscopy of Helium, Methane and Air Plasma Jets at Atmospheric Pressure[J]. SPECTROSCOPY AND SPECTRAL ANALYSIS, 2023, 43(09): 2694-2698. |
[3] |
YANG Kun, CHEN Lei*, CHENG Fan-chong, PEI Huan, LIU Gui-ming, WANG Bao-huai, ZENG Wen. Emission Spectroscopy Diagnosis of Air Gliding Arc Plasma Under
Atmospheric Pressure Condition[J]. SPECTROSCOPY AND SPECTRAL ANALYSIS, 2022, 42(10): 3006-3011. |
[4] |
LI Zheng-kai1, CHEN Lei1*, WANG Mei-qi1, SONG Peng2, 3, YANG Kun1, ZENG Wen1. Diagnosis of Atmospheric Pressure Argon/Air Needle-Ring Dielectric Barrier Discharge Emission Spectrum[J]. SPECTROSCOPY AND SPECTRAL ANALYSIS, 2021, 41(10): 3307-3310. |
[5] |
LI Li-cheng1, GAO Hai-yang1, 2*, BU Ling-bing1, ZHANG Qi-lin1, WANG Zhen1. Inversion of Rotational Temperature in Airglow Layer Based on O2(0-1) Atmospheric Band Spectrum[J]. SPECTROSCOPY AND SPECTRAL ANALYSIS, 2020, 40(10): 3002-3009. |
[6] |
HE Shou-jie1*, BAO Hui-ling1, HA Jing2, ZHAO Kai-yue1, QU Yu-xiao1, ZHANG Zhao1, LI Qing1*. The Optical Characteristics of Hollow Cathode Discharge at Different Modes in Air[J]. SPECTROSCOPY AND SPECTRAL ANALYSIS, 2019, 39(11): 3377-3382. |
[7] |
SUN Hao-yang1, 2, DONG Li-fang1, 2*, HAN Rong1, 2, LIU Bin-bin1, 2, DU Tian1, 2, HAO Fang1, 2. A Spectral Study of Three Kinds Discharge Filaments in a Multiplicate Gas Gap in Dielectric Barrier Discharge[J]. SPECTROSCOPY AND SPECTRAL ANALYSIS, 2019, 39(02): 406-409. |
[8] |
GAO Xing, DONG Li-fang*, WANG Hao, ZHANG Hao. Study on the Plasma Parameters of Single and Double Gas Layer Gap in Dielectric Barrier Discharge[J]. SPECTROSCOPY AND SPECTRAL ANALYSIS, 2017, 37(09): 2692-2697. |
[9] |
WANG Hao, DONG Li-fang*, GAO Xing, WEI Ling-yan. Study on Two Kinds of Rhombus Pattern with Bright Spot and Dim Spot in Dielectric Barrier Discharge by Optical Emission Spectra[J]. SPECTROSCOPY AND SPECTRAL ANALYSIS, 2017, 37(09): 2698-2702. |
[10] |
SONG Yi, LOU Guo-feng*, ZHANG Fan, YANG Yang. Emission Spectrum Diagnosis of Argon/Methane/Air Dielectric Barrier Discharge Plasma[J]. SPECTROSCOPY AND SPECTRAL ANALYSIS, 2017, 37(04): 1237-1242. |
[11] |
FENG Jian-yu1, 2, DONG Li-fang1, 2*, WEI Ling-yan1, 2, LIU Ying1, 2, NIU Xue-jiao1, 2. Study on Spectral Characteristics of Filaments in Three Layers Gas Gap in Dielectric Barrier Discharge[J]. SPECTROSCOPY AND SPECTRAL ANALYSIS, 2017, 37(02): 387-390. |
[12] |
FENG Jian-yu, DONG Li-fang*, WEI Ling-yan, FU Hong-yan, LIU Ying, NIU Xue-jiao. Study on the Plasma Parameters of the Spot-Halo Hexagon Pattern with Optical Emission Spectrum[J]. SPECTROSCOPY AND SPECTRAL ANALYSIS, 2016, 36(06): 1877-1881. |
[13] |
LIU Ying, DONG Li-fang*, NIU Xue-jiao,ZHANG Chao . Study on Hexagonal Super-Lattice Pattern with Light Spot and Dim Spot in Dielectric Barrier Discharge by Optical Emission Spectra [J]. SPECTROSCOPY AND SPECTRAL ANALYSIS, 2016, 36(02): 364-367. |
[14] |
NIU Xue-jiao, DONG Li-fang*, LIU Ying, WANG Qian,FENG Jian-yu . Study on Square Super-Lattice Pattern with Surface Discharge in Dielectric Barrier Discharge by Optical Emission Spectra[J]. SPECTROSCOPY AND SPECTRAL ANALYSIS, 2016, 36(02): 368-371. |
[15] |
GAO Ye-nan, DONG Li-fang*, LIU Ying . Study on Spectral Characteristics of Micro Plasma Channels of Different Gas-Gap in Dielectric Barrier Discharge [J]. SPECTROSCOPY AND SPECTRAL ANALYSIS, 2015, 35(10): 2708-2711. |
|
|
|
|