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SPECTROSCOPY AND SPECTRAL ANALYSIS  2011, Vol. 31 Issue (04): 1138-1141    DOI: 10.3964/j.issn.1000-0593(2011)04-1138-04
光谱学与光谱分析 |
Development of Soft X-Ray Multilayer Mirror at 23.4 nm
LIU Zhen1,2, LI Xu1,2, MA Yue-ying1, CHEN Bo1*, CAO Jian-lin1
1. State Key Laboratory of Applied Optics,Changchun Institute of Optics, Fine Mechanics and Physics,Chinese Academy of Sciences,Changchun 130033,China2. Graduate University of Chinese Academy of Sciences,Beijing 100049,China