光谱学与光谱分析 |
|
|
|
|
|
Application of Laser Induced Breakdown Spectroscopy(LIBS) to Microdetection of Au Film Machining |
YUAN Dong-qing, ZHOU Ming*,SHEN Jian, REN Nai-fei, CAI Lan |
Center for Photo Manufacturing Science and Technology, Jiangsu University, Zhenjiang 212013, China |
|
|
Abstract Film micro-machining is a core in micro- and nano- technology, micro-electro-mechanical systems and photoelectron field. However, it is difficult to control the quality of machining in processing film. In the present paper the authors propose a method to solve this problem by using laser induced breakdown spectroscopy(LIBS). The authors investigated the relation between excitation condition and the quantity of plasma in the process of micro-machining by pulse laser. At low frequency(<20 Hz), when the excitation energy was confirmed, the quantity of plasma was steady and independent of the number of pulses. When the authors used single pulse to excite the film, the quantity of plasma increased with the energy ascension. Based on the quantity of plasma and the species of elements, the authors realized the real-time control of micro-machining become true.
|
Received: 2007-09-08
Accepted: 2007-12-18
|
|
Corresponding Authors:
ZHOU Ming
E-mail: zm-laser@126.com
|
|
[1] Jaegu Kim, Suckjoo Na. Optics & Laser Technology,2007, 39: 1443. [2] Furukawa H, Hashida M. Appl. Surf. Sci.,2002, 197: 114. [3] Chowdhury I H, Xu X F. Numerical Heat Transfer-Application,2003, 44(3):219. [4] Chien C Y, Gupta M C. Appl. Phys. A,2005, 81(6): 1257. [5] Perrie W, Gill M, Robinson G, et al. Appl. Surf. Sci.,2004,230: 50. [6] Bulgakova N M, Bourakov I M. Appl. Surf. Sci.,2002, 197: 41. [7] Brech F, Cross L. Appl. Spectrosc., 1962, 16: 59. [8] YUAN Dong-qing, ZHOU Ming, LIU Chang-long, et al(袁冬青,周 明,刘长隆,等). Spectroscopy and Spectral Analysis(光谱学与光谱分析),2008,28(9):2019. [9] YAO Ning-juan, CHEN Ji-wen, YANG Zhi-jun, et al(姚宁娟, 陈吉文, 杨志军, 等). Spectroscopy and Spectral Analysis(光谱学与光谱分析),2007,27(7): 1452. |
[1] |
TIAN Fu-chao1, CHEN Lei2*, PEI Huan2, BAI Jie-qi1, ZENG Wen2. Study of Factors Influencing the Length of Argon Plasma Jets at
Atmospheric Pressure With Needle Ring Electrodes[J]. SPECTROSCOPY AND SPECTRAL ANALYSIS, 2023, 43(12): 3682-3689. |
[2] |
FANG Zheng, WANG Han-bo. Measurement of Plastic Film Thickness Based on X-Ray Absorption
Spectrometry[J]. SPECTROSCOPY AND SPECTRAL ANALYSIS, 2023, 43(11): 3461-3468. |
[3] |
LIU Hong-wei1, FU Liang2*, CHEN Lin3. Analysis of Heavy Metal Elements in Palm Oil Using MP-AES Based on Extraction Induced by Emulsion Breaking[J]. SPECTROSCOPY AND SPECTRAL ANALYSIS, 2023, 43(10): 3111-3116. |
[4] |
LIU Pan1, 2, 3, DU Mi-fang1*, LI Bin1, LI Jing-bin1, ZENG Lei1, LIU Guo-yuan1, ZHANG Xin-yao1, 4, ZHA Xiao-qin1, 4. Determination of Trace Tellurium Content in Aluminium Alloy by
Inductively Coupled Plasma-Atomic Emission Spectrometry Method[J]. SPECTROSCOPY AND SPECTRAL ANALYSIS, 2023, 43(10): 3125-3131. |
[5] |
ZHU Yu-qi1, 2, ZHANG Xin2, DU Pan-pan2, LIU Shu1, ZHANG Gui-xin1, 2, GUAN Song-lei2*, ZHENG Zhong1*. Infrared Spectroscopy and X-Ray Spectroscopy Combined With
Inductively Coupled Plasma Mass Spectrometry for Quality
Control of Mongolian Medicine Yu Grain Soil[J]. SPECTROSCOPY AND SPECTRAL ANALYSIS, 2023, 43(10): 3163-3169. |
[6] |
YANG Fan1, HAO Liu-cheng1, KE Wei2, LIU Qing1, WANG Jun1, CHEN Min-yuan2, YUAN Huan2*, YANG Ai-jun2, WANG Xiao-hua2, RONG Ming-zhe2. Research on Effect of Laser Incident Angle on Laser-Induced Plasma at Low Pressure[J]. SPECTROSCOPY AND SPECTRAL ANALYSIS, 2023, 43(09): 2740-2746. |
[7] |
ZHANG Zhi-fen1, LIU Zi-min1, QIN Rui1, LI Geng1, WEN Guang-rui1, HE Wei-feng2. Real-Time Detection of Protective Coating Damage During Laser Shock Peening Based on ReliefF Feature Weight Fusion[J]. SPECTROSCOPY AND SPECTRAL ANALYSIS, 2023, 43(08): 2437-2445. |
[8] |
LI Shi-lun1, LIU Tao2, SONG Wen-min3, WANG Tian-le2, LIU Wei1, CHEN Liang1, LI Zhi-gang2*, FENG Shang-shen1*. Study of Two-Dimensional Ordered Magnetic Co Nanosphere Array Film Construction and Its Optical Properties[J]. SPECTROSCOPY AND SPECTRAL ANALYSIS, 2023, 43(07): 2037-2042. |
[9] |
YAN Ming-liang1, ZHANG Chen-long2, ZHAO Lian-xiang3, ZHAO Hua-he4, GAO Xun2*. Spectral Characteristics of Ge Plasma Induced by Femtosecond Pulsed Laser Ablation[J]. SPECTROSCOPY AND SPECTRAL ANALYSIS, 2023, 43(07): 2095-2098. |
[10] |
YUAN Kai-xin, ZHUO Jin, ZHANG Qing-hua, LI Ya-guo*. Study on the Spectral and Laser Damage Resistance of CO2 Laser Modified Sol-Gel SiO2 Thin Films[J]. SPECTROSCOPY AND SPECTRAL ANALYSIS, 2023, 43(06): 1752-1759. |
[11] |
HAN Zhao-xia1, 2, 3*, YANG Zhi-jin1, ZHANG Zhi-hong1, DING Shu-hui1, ZHANG Da-wei1, 2, 3, HONG Rui-jin1, 2, 3, TAO Chun-xian1, 2, 3, LIN Hui1, 2, 3, YU De-chao1, 2, 3. Preparation of Full-Color Carbon Quantum Dots and Their Application in WLED[J]. SPECTROSCOPY AND SPECTRAL ANALYSIS, 2023, 43(05): 1358-1366. |
[12] |
YUAN Shu, WU Ding*, WU Hua-ce, LIU Jia-min, LÜ Yan, HAI Ran, LI Cong, FENG Chun-lei, DING Hong-bin. Study on the Temporal and Spatial Evolution of Optical Emission From the Laser Induced Multi-Component Plasma of Tungsten Carbide Copper Alloy in Vacuum[J]. SPECTROSCOPY AND SPECTRAL ANALYSIS, 2023, 43(05): 1394-1400. |
[13] |
TANG Quan1, ZHONG Min-jia2, YIN Peng-kun2, ZHANG Zhi3, CHEN Zhen-ming1, WU Gui-rong3*, LIN Qing-yu4*. Imaging of Elements in Plant Under Heavy Metal Stress Based on Laser-Induced Breakdown Spectroscopy[J]. SPECTROSCOPY AND SPECTRAL ANALYSIS, 2023, 43(05): 1485-1488. |
[14] |
LIN Jing-tao, XIN Chen-xing, LI Yan*. Spectral Characteristics of “Trapiche-Like Sapphire” From ChangLe, Shandong Province[J]. SPECTROSCOPY AND SPECTRAL ANALYSIS, 2023, 43(04): 1199-1204. |
[15] |
SI Yu1, LIU Ji1*, WU Jin-hui2, ZHAO Lei1, YAN Xiao-yan2. Optical Observation Window Analysis of Penetration Process Based on Flash Spectrum[J]. SPECTROSCOPY AND SPECTRAL ANALYSIS, 2023, 43(03): 718-723. |
|
|
|
|