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SPECTROSCOPY AND SPECTRAL ANALYSIS  2009, Vol. 29 Issue (05): 1260-1263    DOI: 10.3964/j.issn.1000-0593(2009)05-1260-04
光谱学与光谱分析 |
Deposition and Structures Analysis of Amorphous SiNx Films Prepared by Magnetron Sputtering
WU Yang, YI Li-xin*, WANG Shen-wei, DU Yu-fan, HUANG Sheng, JI Guo-rui, WANG Yong-sheng
Key Laboratory of Luminescence and Optical Information, Ministry of Education, Institute of Optoelectronic Technology, Beijing Jiaotong University, Beijing 100044, China