| 光谱学与光谱分析 |
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| The Project and Simulation of a Compositive Miniature Spectrum Instrument Based on the Array of Fabry-Perot Cavity |
| WEN Zhi-yu, CHEN Gang, WANG Jian-guo* |
| Photoelectricity Engineering College of Chongqing University, Chongqing 400044, China |
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Abstract This paper advances a kind of micro-spectrometer based on Fabry-Perot cavity’s character of filtering the waves. The basic structure of the micro-spectrometer is the array of Fabry-Perot cavity which contains many different lengths of cavity on the substrate of silicon, consequently the authors can achieve the detection at several wavelengths simultaneously. The unit of probing is a Fabry-Perot cavity made up of the substrate of silicon-metal film-silicon dioxide layer-metal film. The authors carried out the corresponding simulation. In the basic structure of aluminum film(14 nm)-silicon dioxide layer-silver film(39 nm), the resolution can reach 15 nm. When the area of a unit of probing is 0.14 mm×0.14 mm only, it can reach the luminous flux of miniature grating spectrum instrument(the minimum volume in the order of cm), but the volume of the part of spectrum detection is only of the order of mm. The design size of the micro-spectrometer is a few millimeters. Furthermore it has no movable parts and could detect several wavelengths at the same time. It is possible to fabricate such micro-spectrometer through existing processing methods of IC technology.
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Received: 2005-05-08
Accepted: 2005-08-28
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Corresponding Authors:
WANG Jian-guo
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| Cite this article: |
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WEN Zhi-yu,CHEN Gang,WANG Jian-guo. The Project and Simulation of a Compositive Miniature Spectrum Instrument Based on the Array of Fabry-Perot Cavity[J]. SPECTROSCOPY AND SPECTRAL ANALYSIS, 2006, 26(10): 1955-1959.
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https://www.gpxygpfx.com/EN/Y2006/V26/I10/1955 |
[1] Nishihara H, Haruna M，Suhara T. Optical Integrated Circuits. New York：McGraw-Hill, 1989.
[2] JU Hui, WU Yi-hui(鞠 挥，吴一辉). Optics and Precision Engineering(光学精密工程)，2001, 9(4): 372.
[3] TANG Jin-fa, ZHENG Quan(唐晋发, 郑 权). Application of Film Optics(应用薄膜光学). Shanghai: Scientific and Technical Publishers(上海: 科学技术出版社)，1984.
[4] Dalik Edward D. Handbook of Optical Constants of Solids. Orlando Florida, USA：Academic Press Inc, 1985. |
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