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SPECTROSCOPY AND SPECTRAL ANALYSIS  2009, Vol. 29 Issue (06): 1713-1716    DOI: 10.3964/j.issn.1000-0593(2009)06-1713-04
光谱学与光谱分析 |
A Micro-Silicon Multi-Slit Spectrophotometer Based on MEMS Technology
HAO Peng1, 2, WU Yi-hui1*, ZHANG Ping1, LIU Yong-shun1, ZHANG Ke1, 2, LI Hai-wen1
1. National Key Lab of Applied Optics, Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences, Changchun 130033, China2. Graduate University of Chinese Academy of Sciences, Beijing 100039, China