| 光谱学与光谱分析 |
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| Study on In-Plane Optical Anisotropy of Semiconductor Materials by Reflectance Difference Spectroscopy |
| ZHAO Lei1, CHEN Yong-hai2, ZUO Yu-hua1, WANG Hai-ning3, SHI Wen-hua1 |
1. State Key Laboratory on Integrated Optoelectronics, Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083, China
2. Key Laboratory of Semiconductor Materials Science, Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083, China
3. State Key Laboratory of Sensing Technique, Institute of Electronics, Chinese Academy of Sciences, Beijing 100080, China |
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Abstract In the present review, the measuring principle of reflectance difference spectroscopy (RDS) is given. As a powerful tool in the surface and interface analysis technologies, the application of RDS to the research on semiconductor materials is summarized along with the origins of the in-plane optical anisotropy of semiconductors. And it is believed that RDS will play an important role in the electrooptic modification of Si-based semiconductor materials.
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Received: 2005-05-16
Accepted: 2005-08-26
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Corresponding Authors:
ZHAO Lei
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| Cite this article: |
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ZHAO Lei,CHEN Yong-hai,ZUO Yu-hua, et al. Study on In-Plane Optical Anisotropy of Semiconductor Materials by Reflectance Difference Spectroscopy[J]. SPECTROSCOPY AND SPECTRAL ANALYSIS, 2006, 26(07): 1185-1189.
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| URL: |
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https://www.gpxygpfx.com/EN/Y2006/V26/I07/1185 |
[1] LI Lu-ying, ZHAO You-yuan, YU Shi-rui, et al(李潞瑛, 赵有源, 于世瑞, 等). Spectroscopy and Spectral Analysis(光谱学与光谱分析), 2004, 24(3): 266.
[2] LI Hai-tao, LING Zhen(李海涛, 凌 震). Spectroscopy and Spectral Analysis(光谱学与光谱分析), 1998, 18(2): 129.
[3] Aspnes D E. J. Vac. Sci. Technol. B, 1985, 3: 1498.
[4] CHEN Yong-hai, et al(陈涌海, 等). Research and Progress of Solid State Electronics(固体电子学研究与进展), 2002, 22: 412.
[5] WAN Shou-ke, et al(万寿科, 等). Journal of Functional Materials and Devices(功能材料与器件学报), 2000, 6: 388.
[6] Yasuda T. Thin Solid Films, 1998, 313-314: 544.
[7] Hingerl K, Balderas-Navarro R E, Bonanni A, et al. Appl. Surf. Sci., 2001, 175-176: 769.
[8] Yang Z, Wong G K, Sou I K, et al. Appl. Phys. Lett., 1995, 66: 2235.
[9] Koopmans B, Richards B, Santos P V, et al. 23nd International Conference on Physics of Semiconductors. Singapore: World Scientific, 1996, 1891.
[10] Yasuda T, Mantese L, Rossow U, et al. Phys. Rev. Lett., 1995, 74: 3431.
[11] Chiarotti G, Chiaradia P, Arciprete F, et al. Appl. Surf. Sci., 2001, 175-176: 777.
[12] Akihiro Ohtake, Jun Nakamura, Nobuyuki Koguchi, et al. Surf. Sci., 2004, 566-568: 58.
[13] Rossow U, Mantese L, Aspnes D E. Appl. Surf. Sci., 1998, 123-124: 237.
[14] Liu Feng, Lagally M G. Phys. Rev. Lett., 1996, 76: 3156.
[15] Rebey A, Habchi M M, Bchetnia A, et al. J. Crystal Growth, 2004, 261: 450.
[16] Medel-Ruiz C I, Lastras-Martínez A, Balderas-Navarro R E, et al. Appl. Surf. Sci., 2004, 221: 48.
[17] Kita T, Tachikawa K, Tango H, et al. Appl. Surf. Sci., 2000, 159-160: 503.
[18] Dweritz L, Schützendübe P, Reiche M, et al. Surf. Sci., 1998, 402-404: 257.
[19] Power J R, Weightman P, Cafolla A A. Surf. Sci., 1998, 402-404: 566.
[20] Gurnick M K, Detemple T A. IEEE. Journal of Quantum Electronics, 1983, QE-19: 791.
[21] Chen Y H, Wang Z G, Yang Z. Chin. Phys. Lett., 1999, 16: 56.
[22] Chen Y H, Ye X L, et al. Phys. Rev. B, 2002, 66: 195321.
[23] Ye X, Chen Y H, Xu Bo, et al. EPJ, Appl. Phys., 2004, 27: 297.
[24] Ye X, Chen Y H, Wang J Z, et al. J. Appl. Phys., 2001, 90: 1266.
[25] Yu Rong, Zhu Bang-fen, Wang Qi-ming. J. Phys.: Condens. Matter., 2001, 13: L559. |
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