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SPECTROSCOPY AND SPECTRAL ANALYSIS  2009, Vol. 29 Issue (04): 935-939    DOI: 10.3964/j.issn.1000-0593(2009)04-0935-05
光谱学与光谱分析 |
Model-Based FTIR Reflectometry Measurement System for Deep Trench Structures of DRAM
LIU Shi-yuan1,ZHANG Chuan-wei2,SHEN Hong-wei2,GU Hua-yong2
1. State Key Laboratory of Digital Manufacturing Equipment and Technology, Huazhong University of Science and Technology, Wuhan 430074, China2. Division of Optoelectronic Materials and Micro-Nano Manufacture, Wuhan National Laboratory for Optoelectronics, Wuhan 430074, China