| 光谱学与光谱分析 |
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| Analysis of Optical Emission Spectra from ICP of Ar in the Vicinity of Plasma Sheath |
| ZHAO Wen-feng1，2, CHEN Jun-fang1*,MENG Ran1 |
1. School of Physics and Telecommunications Engineering, Laboratory of Quantum Information Technology, South China Normal University, Guangzhou 510006, China
2. College of Engineering, South China Agricultural University, Guangzhou 510642, China |
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Abstract In order to control the ion density and energy distribution in the vicinity of plasma sheath independently, the inductively coupled plasma and its glow discharge mechanism in the vicinity of plasma sheath were studied by means of optical emission spectroscopy (OES) under different RF power, different discharge and different substrate DC bias voltage. It was shown that the ion density is higher and the electron temperature is lower in the vicinity of inductively coupled plasma sheath according to the ionic line and atomic line. With changing the discharge pressure and RF power, the spectral characteristics analysis shows that the ion density in the vicinity of plasma sheath linearly increases with the RF power and rises with the pressure under the low pressure. The atomic spectral intensity of low excitation states increases rapidly. The atomic spectral intensity of high excitation states rises slowly and the intensity of ion spectrum increases not obviously. By applying the DC bias voltage to substrate, the intensity of emission spectroscopy was analyzed. The result shows that the intensity of spectra rises with the increase in positive bias voltage, while first reduces then increases with the increase in negative bias voltage, and is the weakest in the case of DC bias at -30 V. This shows that the fast ions and the electrons are the main source of energy for Ar ionization and excitation.
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Received: 2008-11-08
Accepted: 2009-02-12
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Corresponding Authors:
CHEN Jun-fang
E-mail: chenjf@scnu.edu.cn
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[1] Qayyum A, Zeb Shaista, Naveed M A, et al. J. Appl. Phys., 2005, 98: 103303.
[2] Zhu Ximing, Pu Yikang. Phys. Plasmas, 2005, 12: 103501.
[3] Lee Minhyong, Chung Chinwook. Appl. Phys. Lett., 2005, 87: 131502.
[4] TANG Xiao-liang, FENG Xian-ping, LI Zhi-guang, et al(唐晓亮, 冯贤平, 黎志光，等). Spectroscopy and Spectral Analysis(光谱学与光谱分析)，2004, 24(11): 1437.
[5] Lee Minhyong, Lee Kyeonghyo, Hyun Dongseok, et al. Appl. Phys. Lett., 2007, 90: 191502.
[6] DAI Zhong-ling，WANG You-nian，MA Teng-cai(戴忠玲, 王友年, 马腾才). Acta Phys. Sin.(物理学报), 2001, 50: 2398.
[7] YU Wei，WANG Bao-zhu，YANG Yan-bin, et al(于 威, 王保柱, 杨彦斌, 等). Acta Phys. Sin.(物理学报), 2005, 54: 2394.
[8] Singh S V，Kempkes P，Soltwisch H. Appl. Phys. Lett., 2006, 89: 161501.
[9] Qayyum A, Zeb Shaista, Naveed M A. Journal of Quantitative Spectroscopy & Radiative Transfer, 2007, 107: 361.
[10] Lieberman A. Principles of Plasma Discharges and Materials Processing(等离子体放电原理与材料处理). Translated by PU Yi-kang, et al(蒲以康，等译). Beijing: Science Press(北京：科学出版社), 2007. 249.
[11] HUANG Song，NING Zhao-yuan，XIN Yu(黄 松, 宁兆元, 辛 煜). Acta Phys. Sin., 2004, 53(10)：3394.
[12] Davide Mariotti, Yoshiki Shimizu, Muoto Koshizaki. Appl. Phys. Lett., 2006, 89: 201502.
[13] ZHANG Jian, REN Chun-sheng, QI Xue-lian, et al(张 健, 任春生, 齐雪莲, 等). Nuclear Fusion and Plasma Physics(核聚变与等离子体物理), 2007, 27(2): 156.
[14] Bogearts A, Gijbels R. J. Appl. Phys., 1998, 84: 121.
[15] Kosku N, Murakami H, Higashi S, et al. Applied Surface Science, 2005, 244: 39. |
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