| 光谱学与光谱分析 |
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| A Study of Depositing Amorphous SiOx Films vis Magnetron Sputtering by FTIR Method |
| WANG Shen-wei,YI Li-xin*,SU Meng-chan, CHEN En-guang, WANG Yong-sheng |
| Key Laboratory of Luminescence and Optical Information, Ministry of Education, Institute of Optoelectronic Technology, Beijing Jiaotong University, Beijing 100044, China |
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Abstract Amorphous SiOx films were deposited on Si substrates by magnetron sputtering technology. Three absorption bands of the SiOx films were detected by Fourier transform infrared spectroscopy. The authors′ investigation shows that Si-Oy-Si4-y(0<y≤4), Si6 rings, and non-bridging oxygen hole center defects were formed in the films with the sputtering power increasing. The appearance of the three absorption bands was due to the stretching and asymmetric stretching vibration of Si—O—Si bond and the vibration of O—Si—O bond corresponding to the above mentioned structures in the SiOx films.
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Received: 2005-12-20
Accepted: 2006-03-28
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Corresponding Authors:
YI Li-xin
E-mail: lx_yx@yahoo.com
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| Cite this article: |
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WANG Shen-wei,YI Li-xin,SU Meng-chan, et al. A Study of Depositing Amorphous SiOx Films vis Magnetron Sputtering by FTIR Method[J]. SPECTROSCOPY AND SPECTRAL ANALYSIS, 2007, 27(03): 456-459.
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| URL: |
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https://www.gpxygpfx.com/EN/Y2007/V27/I03/456 |
[1] Canham L T. Appl. Phys. Lett., 1990, 57: 1046.
[2] Lockwood D J, Lu Z H, Baribeau J M. Phys. Rev. Lett., 1996, 76: 539.
[3] Wu X L, Siu G G, Tong S, et al. Appl. Phys. Lett., 2001, 78: 3058.
[4] Yun F, Hinds B J, Hatatani S, et al. Thin Solid Films, 2000, 375: 137.
[5] Skuja L. Solid State Comm., 1992, 84: 613.
[6] Hajnal Z, Deák P, Khler Th, et al. Solid State Comm., 1998, 108: 93.
[7] Murashov Vladimir. J. Mol. Struct., 2003, 650: 141.
[8] Vladislav Drínek, Pola Josef, Bastl Zdenek, et al. J. Non-Cryst. Solids, 2001, 288: 30.
[9] Perez G, Sanz J M. Thin Solid Films, 2002, 416: 24.
[10] Sen P N, Thorpe M F. Phys. Rev. B, 1977, 15: 4030.
[11] WANG Juan, ZHANG Chang-rui, FENG Jian, et al(王 娟, 张长瑞, 冯 坚, 等). Spectroscopy and Spectral Analysis(光谱学与光谱分析), 2005, 25(7): 1045.
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