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SPECTROSCOPY AND SPECTRAL ANALYSIS  2009, Vol. 29 Issue (03): 752-755    DOI: 10.3964/j.issn.1000-0593(2009)03-0752-04
光谱学与光谱分析 |
Preparation and Characterization of Poly-Si Films on Different Topography Substrates by AIC
WANG Cheng-long1,FAN Duo-wang1*,LIU Hong-zhong2,ZHANG Fu-jia3,XING Da4,LIU Song-hao4
1. National Engineering Research Center for Technology and Equipment of Environmental Deposition, Lanzhou Jiaotong University, Lanzhou 730070, China
2. State Key Laboratory for Manufacturing Systems Engineering, Xi’an Jiaotong University, Xi’an 710049, China
3. Institute of Physics Science and Technology, Lanzhou University, Lanzhou 730000, China
4. School for Information and Optoelectronic Science and Engineering, South China Normal University, Guangzhou 510631, China