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SPECTROSCOPY AND SPECTRAL ANALYSIS  2019, Vol. 39 Issue (02): 377-382    DOI: 10.3964/j.issn.1000-0593(2019)02-0377-06
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A Laser Interferometric Subnano-Scale Micro-Displacement Measurement System Based on Variable Phase Retardation
LIU Tong1, 2, ZHANG Liu1*, ZHANG Guan-yu1, CHEN Chen1*, ZHONG Zhi-cheng1
1. Key Laboratory of Geophysical Exploration Equipment, Ministry of Education, College of Instrumentation & Electrical Engineering, Jilin University, Changchun 130061, China
2. School of Mechanical Science and Engineering, Jilin University, Changchun 130022, China