| 光谱学与光谱分析 |
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| Characterization of Nd Doped Films Prepared by Femtosecond Pulsed Laser Deposition |
| YANG Xian-heng, FENG Guo-ying*, YI Jia-yu, WANG Shu-tong, ZHOU Shou-huan* |
| Institute of Laser & Micro/Nano Engineering，College of Electronics and Information Engineering, Sichuan University, Chengdu 610065, China |
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Abstract Thin films of Nd∶YAG and Nd∶Glass were prepared on Si(100) substrate by pulsed laser deposition technology. The morphology of film surface and cross section, composition, absorption spectrum and photoluminescence (PL) spectra of films were investigated by scanning electron microscope (SEM), energy disperse spectroscopy (EDS), Fourier transform infrared spectrometer(FTIR), optical parametric oscillator(OPO) and grating spectrometer. The results show that both Nd∶YAG films and Nd∶Glass films grown on the substrates at room temperature are amorphous. Nd∶YAG films grown by PLD contain Nd element with 0.15 at.% stoichiometric proportion. The absorption spectrum of bulk Nd∶YAG target rather than deposited films exhibit two absorption peaks at 750 and 808 nm. There are no evident peaks in the photoluminescence spectra curve of Nd∶YAG films. However, the photoluminescence spectra of Nd∶Glass films with two sharp peaks at the wavelength of 877 and 1 064 nm are observed. It indicates that Nd is doped into glass host as optically active Nd3+ ions when Nd∶Glass films grow at room temperature. But for Nd∶YAG films, Nd don’t incorporate into YAG host as Nd3+ ions.
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Received: 2014-04-02
Accepted: 2014-07-25
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Corresponding Authors:
FENG Guo-ying, ZHOU Shou-huan
E-mail: guoing_feng@scu.edu.cn;zhoush@scu.edu.cn
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