光谱学与光谱分析 |
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A Micro-Silicon Multi-Slit Spectrophotometer Based on MEMS Technology |
HAO Peng1, 2, WU Yi-hui1*, ZHANG Ping1, LIU Yong-shun1, ZHANG Ke1, 2, LI Hai-wen1 |
1. National Key Lab of Applied Optics, Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences, Changchun 130033, China 2. Graduate University of Chinese Academy of Sciences, Beijing 100039, China |
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Abstract A new mini-spectrophotometer was developed by adopting micro-silicon slit and pixel segmentation technology, and this spectrophotometer used photoelectron diode array as the detector by the back-dividing-light way. At first, the effect of the spectral bandwidth on the tested absorbance linear correlation was analyzed. A theory for the design of spectrophotometer’s slit was brought forward after discussing the relationships between spectrophotometer spectrum band width and pre-and post-slits width. Then, the integrative micro-silicon-slit, which features small volume, high precision, and thin thickness, was manufactured based on the MEMS technology. Finally, a test was carried on linear absorbance solution by this spectrophotometer. The final result showed that the correlation coefficients were larger than 0.999,which means that the new mini-spectrophotometer with micro-silicon slit pixel segmentation has an obvious linear correlation.
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Received: 2008-02-06
Accepted: 2008-05-08
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Corresponding Authors:
WU Yi-hui
E-mail: yihuiwu@ciomp.ac.cn
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[1] JIN Guo-fan, ZHOU Zhao-ying(金国藩, 周兆英). Modern Scientific Instruments(现代科学仪器), 2000, (3): 72. [2] ZHOU Lian-qun,WU Yi-hui, ZHANG Ping, et al(周连群, 吴一辉, 张 平,等). Optics and Precision Engineering(光学精密工程), 2005, 13(6): 637. [3] LUO Qing-yao, DENG Yan-zhuo, CAI Ru-xiu, et al(罗庆尧, 邓延倬, 蔡汝秀, 等). The Spectrophotometric Analysis(分光光度分析). Beijing: Science Press(北京:科学出版社), 1998. 221. [4] HUANG Mei-zhen, NI Yi, LIN Feng, et al(黄梅珍, 倪 一, 林 峰, 等). Spectroscopy and Spectral Analysis(光谱学与光谱分析), 2005, 25(6): 938. [5] YU Chang-qing,LIU Jie,LI Jia-ze,et al(于常青,刘 杰,李家泽,等). Optical Technique(光学技术),2001,27(2):97. [6] LI Chang-hou(李昌厚). Analysis and Testing Technology and Instruments(分析测试技术与仪器),2004,10(2):65. [7] JU Hui(鞠 挥). Study on Miniaturization of Spectrometer for Biochemical Use(用于生化分析的光谱仪微小型化的研究). Changchun Institute of Optics,Fine Mechanics and Physics,Chinese Academy of Sciences(中国科学院长春光学精密机械与物理研究所),2002. 51. [8] HU Song,WEN Zhi-yu,CHEN Wei-min, et al(胡 松,温志渝,陈伟民,等). Piezoelectrics & Acoustooptics(压电与声光),2000,22(6):363. [9] Owen A J. The Feature of Diode Array Technology in UV/Vis Spectrophotometer, Hong Kong, 1998. 15. [10] YU Dao-yu, TAN Heng-ying(郁道峪, 谈恒英). Engineering Optics(工程光学). Beijing: Mechanical Industry Press(机械工业出版社), 2003. 247. [11] National Research Center for Certified Reference Materials(国家标准物质研究中心). Linear Absorbency Liquid(吸光度线性溶液), 2005. [12] Chrisp M P. App. Opt., 1983,22(10): 1508. [13] Chrisp M P. App. Opt., 1983,22(10):1519. [14] Espinosa-Mansilla A, Salinas F, del Olmo M, et al. Applied Spectroscopy, 1996, 50(4): 449. [15] FEI Ye-tai(费业泰). Error Theory and Data Processing(误差理论与数据处理). Beijing:Mechanical Industry Press(北京:机械工业出版社),2000. 118.
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