| 光谱学与光谱分析 |
|
|
|
|
|
| The Influence of Oxygen Incorporation on the Microstructure and Band Gap Properties of the nc-Si Films |
| JIANG Zhao-yi, YU Wei*, LIU Jian-ping, LIU Hai-xu, YIN Chen-chen, DING Wen-ge* |
| College of Physics Science and Technology, Hebei University, Key Laboratory of Photo-Electricity Information Materials of Hebei Province, Baoding 071002, China |
|
|
|
|
Abstract The authors prepared nc-SiOx∶H thin films using plasma enhanced chemical vapor deposition methods (PECVD) and investigated the influence of oxygen incorporation on the microstructure and band gap properties of the films. The results indicated that with the increase in oxygen mixing ratio (CO2/SiH4), the grain size of the nanocrystal-silicon grain as well as the crystallinity of the film reduced, and the surface tensile stress of the nanocrystal-silicon grain first increased and then decreased. Fourier infrared absorption spectra analysis indicated that, with the increase in oxygen mixing ratio, the intensity of the oxygen rich Si—O bond increased while that of the silicon rich Si—O bond decreased and the structure factor reduced in the meantime accompanied by the improved order degree of thin films. The structure factor increased when the oxygen mixing ratio exceeded 0.08, which shows that the order degree of thin films dropped. In addition, the optical gap increased and the band tail width first increased and then decreased as a result of the incorporation of the oxygen. As a result, the microstructure and band gap properties of the films can be controlled by incorporating oxygen. And the crystallinity and optical gap of the material was high, and the microstructure of the films was improved at the same time when the oxygen mixing ratio was 0.08, so it can be used as intrinsic layer of the thin-film solar cells.
|
|
Received: 2014-10-10
Accepted: 2015-01-11
|
|
|
|
Corresponding Authors:
YU Wei, DING Wen-ge
E-mail: yuwei@hbu.edu.cn
|
|
[1] Yao Yan, Yao Jie, Narasimhan Vijay Kris, et al. Nature Communications, 2012, 3: 664.
[2] Fathi E, Vygranenko Y, Vieira M, et al. Applied Surface Science, 2011, 257：8901.
[3] Mota-Pineda E, Melendez-Lira M, Zapata-Torres M, et al. J. Appl. Phys., 2010; 108(9): 094323.
[4] Yan Baojie, Yue Guozhen, Sivec Laura, et al. Appl. Phys. Lett., 2011, 99: 113，152.
[5] Lambertz A, Grundler T, Finger F. J. Appl. Phys., 2011, 109: 113109.
[6] Comedi D, Zalloum O H Y, Irving E A, et al. J. Appl. Phys., 2006, 99: 023518.
[7] Langfosd J I, Wilson A J C. Journal of Applied Crystallography, 1978, 11: 102.
[8] Hsiao C Y, Shih C F, Su K W, et al. Appl. Phys. Lett., 2011, 99: 053115.
[9] Wei W S, Su J L, Zhang C L, et al. Vacuum, 2011, 86: 151.
[10] Das D, Samanta A. Nanotechnology, 2011, 22: 055601.
[11] Mukhopadhyay S，Ray S. Applied Surface Science, 2011, 257(23): 9717.
[12] He L, Inokuma T, Kurata Y, et al. J. Non-Cryst Solids, 1995, 185: 249.
[13] Rebib F, Tomasella E, Aida S, et al. Plasma Process and Polymers, 2007, 4: s59.
[14] Molinari M, Rinnert H，Vergnat M. Appl. Phys. Lett., 2001, 79(14): 2172.
[15] Gaskell P H, Wallis D J. Phys. Rev. Lett., 1996, 76(1): 66.
[16] Fang C J, Gruntz K J, Ley L, et al. J. Non-Cryst Solids, 1980, 35-36: 255.
[17] Lucovsky G, Nemanich R J, Knights J C. Phys. Rev. B, 1979, 19(4): 2064.
[18] Samanta A，Das D. Solar Energy Materials & Solar Cells, 2009, 93(5)：588.
[19] Daldosso N, Das G, Larcheri S, et al. J. Appl. Phys., 2007, 101：113510.
[20] Scopel W L, Fantini M C A, Alayo M I, et al. Brazilian Journal of Physics, 2002, 32: 366.
[21] Matsuda A. Thin Solid Films, 1999, 337: 1.
[22] Han D X, Wang K D, Owens J M, et al. J. Appl. Phys., 2003, 93: 3776.
[23] Mirabella S, Agosta R, Franzò G, et al. J. Appl. Phys., 2009, 106(10): 103505. |
| [1] |
MA Deng-hao, ZHANG Wei-jia*, LUO Rui-ying, LIU Cheng-yue, JIANG Zhao-yi, MA Xiao-bo, FAN Zhi-qiang. Effect of the Nitrogen Incorporation on the Microstructure and Photoelectric Properties of N Type Nanocrystalline Silicon Thin Films[J]. SPECTROSCOPY AND SPECTRAL ANALYSIS, 2017, 37(02): 629-635. |
| [2] |
ZHANG Xu1, ZHANG Jie2, YAN Zhao-wen2, SHAO Yu-bo3, ZHANG Fu-jia2 . The Analysis of Element and Measure Analysis of NMR Spectrum and XRD Spectrum for High Purity 3,4,9,10 Perylenetetracarboxylic Dianhydride-PTCDA [J]. SPECTROSCOPY AND SPECTRAL ANALYSIS, 2016, 36(11): 3714-3719. |
| [3] |
QIAO Lu, ZHU Ya-bin*, XU Hao . Research on the Preparation and Optical Absorption Properties of Two-Dimensional ZnO Array[J]. SPECTROSCOPY AND SPECTRAL ANALYSIS, 2014, 34(08): 2031-2034. |
| [4] |
DUAN Liang-fei1, 2, YANG Wen1, 2 , YANG Pei-zhi1, 2*, ZHANG Li-yuan1, 2, SONG Zhao-ning3 . Research on the Phase and Optical Properties of nc-Si Films Prepared by Low Temperature Aluminum Induced Crystallization [J]. SPECTROSCOPY AND SPECTRAL ANALYSIS, 2014, 34(08): 2169-2174. |
| [5] |
ZHANG Nian-bo1, TIAN Jin-xiu1, LI Wei1, WU Li-li1, LI Bing1, ZHANG Jing-quan1*, FENG Liang-huan1，XU Ming2，3 . Silicon Nanocrystals Doping and Surface Modification [J]. SPECTROSCOPY AND SPECTRAL ANALYSIS, 2014, 34(02): 331-334. |
| [6] |
TANG Huan-wei1, ZHANG Li-ping1*, LI Shuai1, ZHAO Guang-jie1, QIN Zhu2，SUN Su-qin2 . Study on Spectroscopic Characterization and Property of PES/ Micro-Nano Cellulose Composite Membrane Material [J]. SPECTROSCOPY AND SPECTRAL ANALYSIS, 2010, 30(03): 630-634. |
| [7] |
CHEN Wei-wei1,2, FENG Shang-yuan1, LIN Wen-shuo1, 3, CHEN Rong1*, LI Yong-zeng1, LIN Ju-qiang1, HUANG Rui-xiang1. Surface-Enhanced Raman Spectroscopic Analysis of Largehead Atractylodes Rhizome Decoction[J]. SPECTROSCOPY AND SPECTRAL ANALYSIS, 2009, 29(09): 2450-2452. |
| [8] |
JIN Pei-peng1,2,DING Yu-tian1,XU Guang-ji1, LIU Yan2. Spectroscopic Characterization and Properties of Mg2B2O5w/AZ91D Magnesium Composites[J]. SPECTROSCOPY AND SPECTRAL ANALYSIS, 2008, 28(07): 1665-1669. |
| [9] |
DING Wen-ge, YU Wei, YANG Yan-bin, ZHANG Jiang-yong, FU Guang-sheng. Bonding Structure in Silicon Nitride Thin Films Containing Silicon Nano-Particles[J]. SPECTROSCOPY AND SPECTRAL ANALYSIS, 2006, 26(10): 1798-1801. |
|
|
|
|
