光谱学与光谱分析 |
|
|
|
|
|
Effects of Annealing Temperature on the Structure and Optical Properties of ZnMgO Films Prepared by Atom Layer Deposition |
SUN Dong-xiao1, LI Jin-hua1*, FANG Xuan1, 2, CHEN Xin-ying1, FANG Fang1, CHU Xue-ying1, WEI Zhi-peng1, 2, WANG Xiao-hua1 |
1. School of Science, Changchun University of Science and Technology, Changchun 130022, China 2. International Joint Research Center for Nanophotonics and Biophotonics, Changchun 130022, China |
|
|
Abstract In the present paper, we report the research on the effects of annealing temperature on the crystal quality and optical properties of ZnMgO films deposited by atom layer deposition(ALD). ZnMgO films were prepared on quartz substrates by ALD and then some of the samples were treated in air ambient at different annealing temperature. The effects of annealing temperature on the crystal quality and optical properties of ZnMgO films were characterized by X-ray diffraction (XRD), photoluminescence (PL) and ultraviolet-visible (UV-Vis) absorption spectra. The XRD results showed that the crystal quality of ZnMgO films was significantly improved when the annealing temperature was 600 ℃,meanwhile the intensity of(100)diffraction peak was the strongest. Combination of PL and UV-Vis absorption measurements showed that it can strongly promote the Mg content increasing in ZnMgO films and increase the band gap of films. So the results illustrate that suitable annealing temperature can effectively improve the crystal quality and optical properties of ZnMgO films.
|
Received: 2013-09-13
Accepted: 2014-01-20
|
|
Corresponding Authors:
LI Jin-hua
E-mail: jhli_cust@163.com
|
|
[1] Li Chaoyang, Wang Dapeng, Li Zeming, et al. Journal of Materials, 2013, 2013: 547271. [2] Campos L C, Guimaraes M H D, Goncalves A M B, et al. AIP Advances, 2013, 022104: 2. [3] Kin C K, Lim Kim J M, Choi H, et al. Journal of Power Sources, 2013, 232: 159. [4] Zhao Minggang, Wang Xinchang, Ning Lingling, et al. Journal of Alloys and Compounds, 2010, 507: 97. [5] Chen Xiaohang, Kang Junyong. Semicond. Sci. Technol, 2008, 23: 025008. [6] Ju Z G, Shan C X, Yang C L, et al. Appl. Phys. Lett., 2009, 94: 101902. [7] Choi C H, Kim S H. Journal of Crystal Growth, 2005, 283: 170. [8] WANG Yong-jie(王勇杰). University of Jinan(济南大学), 2012. [9] Hou Qiongqiong, Meng Fanjie, Sun Jiaming. Nanoscale Research Letters, 2013, 8: 144. [10] Fang Dongyu, Li Chaoling, Wang Nan, et al. Crystal Research and Technology, 2013, 48(5), 265. [11] Li Xueyong, Cui Liling, Yan Qinyun. Journal of Hunan University of Technology, 2011, 5: 23. [12] Singh A, Kumar D, Khanna P K, et al. Thin Solid Films, 2011, 519: 5826. [13] Wang Y G, Lau S P, Lee H W, et al. Appl. Phys., 2003, 94: 354. [14] Shin Y H, Kim Y. Journal of the Korean Physical Society, 2012, 61: 594. [15] Wei X Q, Zhang Z G, Liu M, et al. Materials Chemistry and Physics, 2007, 101: 285. [16] Christian F, Marcel G, Markus H, et al. Materials Science, 2013, 1494: 5. |
[1] |
CHENG Hai-peng1,2, GENG Feng2, LIU Min-cai2, ZHANG Qing-hua2, LI Ya-guo1*. Spectral and Laser-Induced Damage Characteristics of Atomic Layer Deposited SiO2 Films on Fused Silica Glass[J]. SPECTROSCOPY AND SPECTRAL ANALYSIS, 2021, 41(07): 2307-2313. |
[2] |
ZHANG Chun-mei, WANG Dong-dong, FANG Ming, ZHANG Ao, WANG Xiao-yu, CHEN Qiang, MENG Tao* . Optical Properties of ZnO Films Fabricated by Atomic Layer Deposition [J]. SPECTROSCOPY AND SPECTRAL ANALYSIS, 2016, 36(01): 27-30. |
[3] |
CHEN Fang1, FANG Dan1*, WANG Shuang-peng2*, FANG Xuan1, TANG Ji-long1, ZHAO Hai-feng2, FANG Fang1, 3, CHU Xue-ying1, LI Jin-hua1, WANG Fei1, WANG Xiao-hua1, LIU Guo-jun1,MA Xiao-hui1, WEI Zhi-peng1 . Optical Properties Investigation of p-Type ZnO Film Based on Doping by Diffusion [J]. SPECTROSCOPY AND SPECTRAL ANALYSIS, 2015, 35(07): 1787-1790. |
[4] |
Lü Shan-shan1, FANG Xuan1*,WANG Jia-qi1, FANG Fang1,ZHAO Hai-feng2, CHU Xue-ying1, LI Jin-hua1, FANG Dan1, TANG Ji-long1, WEI Zhi-peng1, MA Xiao-hui1, WANG Xiao-hua1*, PU Shuang-shuang1, XU Li1 . Preparation of MgxZn1-xO /Au/MgxZn1-xO Multilayer Transparent Conductive Film and Studies of Its Photoelectric Properties[J]. SPECTROSCOPY AND SPECTRAL ANALYSIS, 2014, 34(09): 2355-2359. |
[5] |
DONG Wan, MENG Tao, CHEN Qiang* . Atomic Layer Deposited Aluminum Oxide on SnO2 Particles and Its Impact on Dye-Sensitized Solar Cells Performance[J]. SPECTROSCOPY AND SPECTRAL ANALYSIS, 2014, 34(01): 172-174. |
[6] |
DONG Li-na, WANG Yu-xin*, SUN Jing-chang, ZHENG Ya-ru, ZHANG Huan, LIANG Ming, LIN Mao-kui, CUI Shuo . Effect of Substrate Temperature on Structure and Photoluminescence of ZnMgO Films [J]. SPECTROSCOPY AND SPECTRAL ANALYSIS, 2013, 33(08): 2051-2054. |
[7] |
YIN Ming, ZHANG Xin-ping*, LIU Hong-mei. Effect of Annealing Temperature on the Crystallization and Spectroscopic Response of a Small-Molecule Semiconductor Doped in Polymer Film [J]. SPECTROSCOPY AND SPECTRAL ANALYSIS, 2012, 32(11): 3078-3082. |
|
|
|
|