Calibration Method of Pressure Gauges Based on Cavity Ring-Down Spectroscopy Technique
ZHOU Sheng1, 2, HAN Yan-ling1, LI Bin-cheng1, 3*
1. Institute of Optics and Electronics, Chinese Academy of Sciences, Chengdu 610209, China
2. University of Chinese Academy of Sciences, Beijing 100049, China
3. School of Optoelectronic Information, University of Electronic and Science and Technology of China, Chengdu 610054, China
Abstract：The accurate measurement of pressure is of great importance to industry process control. In absorption spectroscopy, the spectral line profile and line-width of gas depend on the molecular interactions, temperature, pressure and other factors. The pressure induced line- broadening effect of narrow-band absorption lines of gases can be used for pressure measurement and calibration. A novel pressure gauge calibration method based on cavity ring-down spectroscopy (CRDS) and pressure induced line-broadening effect is presented and experimentally demonstrated at room temperature with a CRDS setup employing a 5.2 μm tunable quantum cascade laser and an absorption line of trace moisture in air near 1 877 cm-1 wavenumber. The measured line-width is 0.084 21 cm-1, and the corresponding pressure is 98.12 kPa, which is in good agreement with a high-precision pressure gauge reading 98.14 kPa. A pressure measurement limit of 0.18 kPa is achieved, estimated from the line-width measurement uncertainty. In addition, the measured pressure broadening coefficient is (0.087 12±0.000 965) cm-1·atm-1, which is in good agreement with the reference value 0.087 1 cm-1·atm-1 given by HITARN database at the same temperature. The proposed method is applied to calibrate a small-scale pressure gauge with sufficient accuracy. The results indicate that high-resolution measurement of absorption line based on CRDS has the potential for high-accuracy pressure measurement and calibration.
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